At a glance
| Booth | N0583 |
| Country | TW |
| Website | www.chd-tech.com.tw |
Company profile
CHYI DING Technologies Co., Ltd. was founded in 2003 and provides mini-environment control equipment to technically demanding semiconductor and panel customers to increase yield and efficiency. Its main products and services include mini-environment control for advanced processing, chemical contamination detection and removal, total solutions, energy saving and cleanroom construction. CHYI DING Technologies Co., Ltd. also provides high-specification precision air-conditioning equipment and energy-saving engineering services for semiconductor, electronics manufacturing and component-material industries as a one-stop service intended to improve production performance and sustainable competitiveness.
Exhibits
CHYI DING Technologies Co., Ltd. provides precision process environmental-control equipment for wafer fabs, packaging and test plants, and the panel industry, including precision temperature and humidity control for photoresist coating and developing equipment, exposure tools, etching and resist-strip equipment, and wafer-cleaning equipment. The equipment reaches temperature-control accuracy of ±0.001°C and humidity-control accuracy of ±0.3%RH; the company says it broke a foreign-supplier monopoly, describes the temperature-control precision as world-leading, and says the systems support yield in exposure, developing and coating processes. Its service flow covers customer requirement discussions, customized equipment specifications and solutions, on-site installation with piping and electrical configuration, on-site testing and acceptance for stable operation, after-sales service, and process optimization and adjustment. The Thermal AMC Unit prevents fogging of exposure-equipment lens assemblies, uses a proprietary water-washing technology to remove process volatile organic compounds, and is listed with Running Cost ↓35%. The Direct Cooling System replaces electric heating with precision heat-pump heat-recovery technology and is listed with Running Cost ↓67%. The TCU– Dry type combines constant-temperature equipment with a dehumidifying rotor to provide low-humidity constant-temperature air, including extremely low-humidity air below 1%RH or at a dew point of 0~-35°C. The Thermal Humidity and Chiller unit is described as reducing electricity use by 15% and footprint by 30% compared with market equipment and is listed with Running Cost ↓15%. The Wet AMC Control Unit is described as delivering 10-20% energy savings and reducing operating cost by 32%, with Running Cost ↓32%. The Thermal Control Unit Gen.2.0 uses precision heat-pump heat-recovery technology instead of electric heating and is listed with Running Cost ↓67%. Its precision process environmental equipment provides precision temperature and humidity control with temperature accuracy up to ±0.001°C for semiconductor, panel and packaging-test industries, while its chemical-pollutant equipment removes 95% of chemical pollutants during processes for semiconductor manufacturing, semiconductor equipment and panel manufacturing. Its process-improvement service is intended to increase production capacity and yield for semiconductor manufacturing, and its technical service provides precision-process solutions for semiconductor and panel manufacturing. Additional service categories include engineering planning services, engineering system design, energy-saving engineering services and automation-system improvements; its listed industrial applications include semiconductors, electronics manufacturing and optoelectronic panels.
Capabilities and products
- advanced-process mini-environment control equipment
- chemical contamination detection and removal
- cleanroom construction
- ±0.001°C / ±0.3%RH precision temperature-humidity control
- exposure-lens fogging and VOC control
- heat-pump heat-recovery direct cooling system
- <1%RH low-humidity constant-temperature equipment
- wet-process AMC removal equipment
- chemical-pollutant removal equipment at 95%
- precision air-conditioning and energy-saving engineering