At a glance
| Booth | Q5139 |
| Country | KR |
| Website | www.chunma.co.kr |
Company profile
CHUNMA HI-TECH was established in 1993 and specializes in ultra-high-purity QUARTZWARE for semiconductor manufacturing. The company produces quartzware by machining, welding and surface processing quartz glass, a core material used in semiconductor manufacturing processes. As semiconductor micro-processing advances, CHUNMA HI-TECH develops chamber components intended to reduce contamination and impurities while pursuing particle-free, ultra-high-purity and long-lasting products. Quartz combines a low thermal-expansion coefficient, high ultraviolet transmittance and chemical durability, but its high strength and brittleness make precision machining difficult. CHUNMA HI-TECH has accumulated more than 30 years of quartz-processing experience together with continuing technology development and innovation for ultra-fine machining and high-quality production. Its quartzware manufacturing system standardizes high-precision machining, welding and Fire Polishing processes and maintains equipment for those operations so customized products can be produced in-house. The company has developed quartz-specialized equipment and introduced production automation using robots to address productivity limits associated with high-mix, low-volume quartzware production and defects related to manual movement between processes. Automation has also been extended to a system designed to respond to mass-production requirements. A collaborative-robot production line automates loading and unloading, positioning, machining and transport to support precise, uniform-quality mass production. CHUNMA HI-TECH supplies quartzware on an OEM basis to global quartzware suppliers including Wonik QnC, Youngshin Quartz, Kumkang Quartz and Worldex. The company has production and quality certification systems associated with semiconductor equipment companies TEL and LAM RESEARCH. Its processing capabilities include CNC and MCT machining, lapping, sanding, chemical etching, quartz welding, Fire Polishing, DI and ultrasonic cleaning, etching, CMM and polariscope inspection, and laser marking. From 1993, the company's activities included semiconductor quartz and ceramic processing, RING, BOAT and CYLINDER cutting, and FLANGE machining. In 2002, it added LCD 5th-, 6th- and 7th-generation ceramic processing and obtained CLEAN workplace, venture-company and parts-and-materials specialist certifications. In 2013, CHUNMA HI-TECH expanded its quartz-production processes, expanded factory capacity to operate plants 1 and 2, added a quartz-welding process and began producing BATH products for wafer cleaning. In 2014, the company expanded facilities and equipment, introduced a TUBE fire lathe and an electric furnace for TUBE heat treatment, and set up TUBE grinder equipment for 12-inch processing. In 2020, it developed an automatic Fire Polishing device, obtained TEL equipment-company parts-processing certification, moved TOP-B and TOP-GND through quality certification and mass production, and introduced a robot-based automatic machining system. In 2022, CHUNMA HI-TECH built a Gumi factory, established a collaborative-robot mass-production automatic machining system and obtained ISO9001 /14001 :2015 certification. For production management, the company combines continuing R&D investment with ERP and MES SYSTEM and real-time QCD management covering quality, cost and delivery.
Exhibits
Quartz, or silica SiO2, is glass composed solely of SiO2 and has an extremely low thermal expansion coefficient of 0.5 × 10−6/°C, excellent UV transmittance and high chemical durability. These material properties support quartz use in semiconductor processes as well as solar cells, displays, LEDs and aerospace applications. CHUNMA HI-TECH selects processing routes according to customer requirements to fabricate quartz materials in varied shapes and focuses on high-purity QUARTZ WARE for critical semiconductor processes. In semiconductor equipment, quartz is used where resistance to high temperatures and corrosive chemical reactions is required. Semiconductor quartz can serve as consumable chamber components or as focus rings that hold wafers during etching, and these semiconductor quartz components are collectively described as QUARTZ WARE. Because QUARTZ WARE quality and machining precision directly affect semiconductor-product yield, CHUNMA HI-TECH manufactures high-precision quartzware for these process requirements. The company identifies five core semiconductor-process groups: Diffusion, Thin Film, Photo, Etching, and CMP & Cleaning, which are repeated many times to build fine circuits on wafers. For diffusion processing, impurities are introduced by gas or deposited material and then diffused into the wafer surface to change semiconductor electrical properties. QUARTZ BOAT products hold wafers inside the diffusion chamber, while large tube-shaped QUARTZ TUBE products surround the mounted boats during processing. TUBE products include Process TUBE, Inner Tube and Outer Tube configurations for high-temperature processing. Quartz tubes inject gases into the chamber, help prevent contamination from external particles and accommodate BOATs inside for the process. These often-large TUBE products require precise machining, advanced welding and Fire Polishing to create complex and varied shapes. BOAT products include Ring Boat, Vertical Boat and Horizontal Boat designs with recessed slots that hold individual wafers inside diffusion tubes. The BOAT configuration depends on wafer arrangement, and its manufacture requires high precision together with advanced machining and welding. Assembly components include CAP, PEDESTAL, PLATE and BASE products. Pedestals, caps and bases support BOATs, limit heat loss and help maintain uniform deposition on wafer surfaces. Injector components include INJECTOR and NOZZLE products that supply or discharge gases inside diffusion chambers and are manufactured in different shapes according to their role. The quartz-product range also includes RING, SHIELD, TOP, single-ring, CAP COVER, WINDOW, BATH, QUARTZ BOAT SLOT, NOZZLE and FLANGE-related items among other quartz parts.
Capabilities and products
- Custom manufacturing and volume production of high-purity semiconductor quartz components
- CNC/MCT precision machining of quartz
- Quartz lapping and sanding surface treatment
- Quartz chemical etching
- Quartz welding
- Quartz fire polishing
- Quartz cleaning with deionized water and ultrasound
- Quartz laser marking
- Quartz tubes for semiconductor diffusion processes
- Ring, vertical and horizontal quartz boats
- Quartz boat support components
- Quartz injectors and nozzles for diffusion furnaces
- Quartz rings
- Quartz windows
- Quartz cleaning baths
- Quartz flanges
- OEM supply of quartz components
- CMM and polariscope inspection of quartz components