At a glance
| Booth | M0134 |
| Country | TW |
| Website | www.canon-se.com.tw/hitech/tc/index.html |
Company profile
Canon operates in Taiwan through Canon Semiconductor Equipment Taiwan, Inc. and works with clients in Taiwan's semiconductor and FPD manufacturing sectors, which are part of the country's high-technology manufacturing base. The company states that promoting client productivity is its chief mission and that its work gives clients in Taiwan means to produce high-tech products. Its Taiwan description emphasizes service based on specialized knowledge and added value for advanced enterprises in Taiwan. Canon has operated in Taiwan over a long period and describes its role as directly supporting the development of Taiwan's electrical, electronics, semiconductor, and FPD manufacturing industries. The company describes Taiwan's semiconductor and FPD manufacturing industries as recognized worldwide and expresses pride in having contributed to the development of those industries over its years of local activity. It states that it will continue maintaining an amicable relationship with customers in Taiwan, growing together with them and contributing further to the development of Taiwan's manufacturers and advanced industries.
Exhibits
Canon's business scope includes sales of imported semiconductor manufacturing equipment and sales of imported LCD display manufacturing equipment, covering equipment for both semiconductor and flat panel display production. For the equipment it sells, Canon provides installation and maintenance services and also conducts operational and maintenance training for customers who purchase its products. The product and service categories shown by Canon Semiconductor Equipment Taiwan include Semiconductor Equipment, FPD Equipment, Vacuum Equipment, Refurbishment Service, and Canon Machinery Products. Canon microlithography tools called steppers and scanners are used primarily to manufacture integrated circuit devices by projecting circuit-layer patterns from a photomask across the surface of a silicon wafer. After imaging, the silicon wafer is developed, etched, cleaned, doped, metallized and polished, and the sequence is repeated on additional layers until the integrated circuits are completely formed. Because the number and complexity of features differ from layer to layer, Canon describes each IC device and process as requiring an integrated suite of imaging tools for cost-effective volume production. Canon provides steppers and scanners across technology nodes from rough layers to critical layers, with equipment that handles wafer sizes up to 300mm diameter. For LCD display manufacturing, Canon lists a Mirror Projection Aligner, or MPA, that combines a large reflective optical system with high-speed non-contact linear motors for high-speed and high-precision exposure of extra-large glass plates. The MPA specification states an extra-large glass-plate exposure size of 2,200mm x 2,500mm using total exposure. With that total-exposure format, one plate is described as producing three 57-inch wide TV display panels, eight 45-inch wide TV display panels, or eighteen 32-inch wide TV display panels. Across these offerings, Canon combines semiconductor and FPD manufacturing equipment with installation, maintenance, customer operation training, and maintenance training as part of its all-around service scope. The listed semiconductor microlithography and LCD display manufacturing equipment information is dated 2008/10/1.
Capabilities and products
- semiconductor lithography steppers
- semiconductor lithography scanners
- lithography equipment for 300mm wafers
- FPD/LCD mirror-projection aligners
- 2,200mm × 2,500mm FPD full-panel exposure
- single-substrate exposure for 3×57-inch, 8×45-inch or 18×32-inch panels
- semiconductor manufacturing equipment installation and maintenance
- equipment operation and maintenance training
- vacuum equipment
- semiconductor and FPD equipment refurbishment service