At a glance
| Booth | S7330 |
| Country | US |
| Website | www.ancorp.com |
Company profile
Since 1965, ANCORP has manufactured high- and ultra-high-vacuum components in the United States, supporting scientific and technological work for researchers, engineers, OEMs, manufacturers, and industrial users worldwide. Its core manufacturing range covers vacuum flanges, fittings, valves, chambers, feedthroughs, traps, viewports, and custom fabrications, spanning standardized hardware and purpose-built assemblies for demanding vacuum systems. ANCORP describes its high-vacuum ball valve as a patented design for harsh coating and deposition environments, where reducing valve failures and system downtime is intended to improve productivity. The company's products are used by customers working in thin-film deposition, surface analysis, laser devices, cryogenics, aerospace, semiconductor manufacturing, and other applications that depend on controlled high-vacuum environments. ANCORP supports work ranging from one-of-a-kind research builds to production-quantity chambers for OEM programs, pairing standard components with build-to-print and fully customized fabrication. The company remains family-founded in identity and presents its role as supplying vacuum hardware, valves, chambers, and custom fabrications across research and production settings.
Exhibits
For semiconductor manufacturing, ANCORP supplies high- and ultra-high-vacuum products used in process tools, metrology equipment, and downstream gas-abatement systems where cleanliness and contamination control are critical. Its semiconductor application coverage includes EUV lithography, scrubber and abatement tools in the subfab, wafer-handling load locks, etching tools, and scanning electron microscopy. In EUV lithography, vacuum chambers can enclose the light source, mirror arrays, and wafer stage as interconnected pumped volumes, while ConFlat (CF) flanges and fittings form leak-tight copper-gasket seals for chamber ports, diagnostics, viewports, pumps, sensors, and actuators. Rotary motion feedthroughs transmit rotation into EUV vacuum chambers without breaking the seal, supporting wafer-stage alignment and in-situ mirror adjustment where repeatable motion and system uptime are important. For subfab abatement, ANCORP's multiport high-vacuum ball valves use corrosion-resistant construction, high-temperature capability, clean dynamic sealing, PTFE seats, FKM or FFKM O-rings, and fully ported balls, with 3-, 4-, and 5-way routing configurations. ISO-QF (KF) flanges and fittings provide quick modular connections from rough to high vacuum, making them suitable for serviceable abatement sections and prototype setups that need frequent assembly or reconfiguration. Wafer-handling load locks use sealed transition chambers to move wafers between atmospheric and vacuum environments while protecting vacuum integrity, reducing pump-down time, and maintaining throughput. ANCORP offers spherical, cylindrical, and box vacuum chambers for load-lock and process configurations, with stainless-steel or aluminum construction described for repeated vacuum cycling and low outgassing. Vacuum viewports for load locks can use quartz, sapphire, borosilicate glass, and other materials to support visual inspection or optical access for laser interferometers, cameras, and IR sensors without opening the vacuum environment. For dry etch and plasma etch tools, vacuum chambers provide the controlled environment for plasma physics, gas-phase chemistry, and wafer-surface reactions, while angle valves manage gas flow and isolation and pendulum valves provide precise chamber-pressure regulation. CF and ISO flanges and fittings connect vacuum lines, gas lines, valves, viewports, pumps, and process chambers, using copper-gasket or elastomer O-ring sealing approaches according to the vacuum zone and maintenance needs. In scanning electron microscopy, vacuum chambers maintain the electron column and sample environment, gate valves isolate the sample chamber during loading, angle valves control roughing or vent lines, and CF or KF connections join pumps, gauges, valves, and chamber ports. Beyond catalog components, ANCORP offers corrosive-resistant fast-actuating valves for isolating reactors, traps, and scrubbers, custom chambers from research builds to OEM quantities, and fully customizable high-vacuum valves with multiple flow patterns for semiconductor and coating processes. This combination of flanges and fittings, vacuum valves, chambers, feedthroughs, traps, viewports, and custom vacuum fabrications gives ANCORP a component set that can be applied from source-vacuum hardware through process, inspection, wafer transfer, and exhaust-abatement subsystems. In SEM sample handling, gate valves can isolate the sample chamber from the pumping system during loading and unloading, and their large-orifice design is intended to reduce conductance loss when open while supporting rapid pump-down and consistent chamber base pressure. For service and maintenance zones, KF fittings use an O-ring and clamp for rapid assembly and disassembly, while bakeable CF joints use knife-edge stainless-steel flanges and copper gaskets where ultra-high-vacuum integrity is required.
Capabilities and products
- high- and ultra-high-vacuum flanges
- vacuum fittings
- vacuum valves
- vacuum chambers
- vacuum motion feedthroughs
- vacuum viewports
- custom vacuum fabrication
- wafer-handling load-lock chambers
- vacuum pendulum valves