At a glance
| Booth | R7200 |
| Country | TW |
| Website | www.zygo.com/industries/semiconductor |
Company profile
ZYGO Corporation is a global leader in the design and manufacture of advanced optical metrology systems and ultra-precise optical components and assemblies. Its mission is to enable customer success through precision optical and metrology solutions, and its core product categories include 3D optical profiler systems, laser interferometer systems, absolute position sensors, displacement position sensors, optical components, and optical assemblies. ZYGO has a large and highly knowledgeable team of precision-metrology and optics experts, and the company links its capabilities to values centered on precision, quality, integrity in customer relationships, and pride in its work. Approximately 750 patents have been awarded since the company's founding, and ZYGO describes itself as vertically integrated with teams working collaboratively under one roof. Founded in 1970 and headquartered in Middlefield, Connecticut, ZYGO has a global presence supported by approximately 500 dedicated and highly skilled individuals. In 2014, ZYGO became part of the Ultra Precision Technologies Division of AMETEK, Inc., and it collaborates with AMETEK sister companies on technologies and resource sharing while continuing to serve precision-metrology and optics needs.
Exhibits
For semiconductor research and production, ZYGO provides metrology systems for high-precision optics characterization, OEM position sensors for precise stage control, and optical components and assemblies. The semiconductor offering is positioned to support optimized performance, lower costs, improved quality, and increased yields across research and production challenges. ZYGO's non-contact metrology systems make nanoscale measurements of form and roughness across a wide range of precision surfaces and also measure transmitted wavefront in optical components and optical systems. Its nano-position sensors are widely used in closed-loop motion-control systems, mainly for lithography and inspection-tool staging and also for deformable optical systems. The optical-component business fabricates high-precision optical components for projects that can have a high degree of difficulty. ZYGO's optical design, assembly, and integration team develops and produces complex electro-optical assemblies for mission-critical applications. Together, these metrology systems, position sensors, optical components, and optical assemblies connect precision measurement and motion control with semiconductor lithography, inspection, optics characterization, and production equipment environments. ZYGO places its semiconductor work within an industry that has pursued faster, smaller, and more affordable devices for more than 50 years under the continuing innovation associated with Moore's Law. Within that environment, high-precision optics characterization, precise stage control, optical components, and optical assemblies are presented as complementary capabilities rather than isolated product categories. The company states that its expertise is intended to help semiconductor customers address both current and future challenges in research and production while improving performance, quality, cost, and yield. Its precision-optics mission combines metrology and optics in vertically integrated development and manufacturing, allowing position sensing, surface measurement, wavefront measurement, precision components, and electro-optical assembly to be supplied from related technical groups.
Capabilities and products
- 3D optical profiler systems
- laser interferometer systems
- absolute position sensors
- displacement position sensors
- non-contact nanoscale surface metrology
- high-precision optical components and assemblies