At a glance
| Booth | T9404 |
| Country | SE |
| Website | www.alixlabs.com |
Company profile
AlixLabs is a Swedish semiconductor equipment company pioneering Atomic Pitch Splitting (APS™), an atomic layer etch-based patterning technology designed to simplify advanced chip manufacturing. Based in Lund, Sweden, AlixLabs develops etch solutions that help chipmakers reduce patterning complexity, improve critical dimension control, and support continued scaling for advanced logic and memory devices. APS™ complements existing lithography and etch flows by splitting the pitch of existing line patterns, reducing reliance on complex multi-patterning. AlixLabs has demonstrated APS™ on industry-relevant silicon, including 300 mm UMC wafers and Intel FinFET test silicon, and launched Sax Forma, its first commercially available APS™ system, to support customer engagement, process integration, and industrial deployment. Winner of the IC Taiwan Grand Challenge Smart Manufacturing category, AlixLabs is engaging Taiwan’s semiconductor ecosystem to enable more cost-efficient scaling.
Exhibits
Provides Atomic Pitch Splitting (APS™), an atomic-layer-etch-based patterning technology and related etch solutions for reducing advanced-chip patterning complexity and improving critical-dimension control; its commercial APS™ system is Sax Forma.
Capabilities and products
- Atomic Pitch Splitting (APS) technology
- reducing patterning complexity and multi-patterning reliance
- demonstrated on 300 mm UMC wafers and Intel FinFET test silicon
- Sax Forma, first commercially available APS system
- winner of the IC Taiwan Grand Challenge Smart Manufacturing category
- Swedish semiconductor equipment company