At a glance
| Booth | P5200 |
| Country | TW |
| Product categories | Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers |
| Website | www.atschiller.com |
Company profile
ATS is a leader of heat exchange chiller manufacturer in the world. We manufacture HEX and chillers with a operating range from -70degC~200degC. The main application of our products specialize in main Etcher system AMT, Lam, Mattson, Hitachi, and KE etc. Our system provide stable temperature control of +/-1 degC for wafer manufacturing process. We lead in service and repair for all chillers in the industry. We specialize in sales for Galden a heat transfer fluid for semiconductor.
Exhibits
ATS is a part of Collins Aerospace, which produces many products for the airline industry, including aircraft galley chillers – this provides a solid foundation for Advanced Thermal Sciences. ATS is the supplier of choice for the semiconductor industry, having thousands of units installed at leading manufacturers. Through a series of acquisitions, and mergers, ATS has grown over the years. Our state of the art technology, reliability, and product offerings make us your one source for temperature control systems, and with the backing of a multi-billion dollar corporation, advanced technology requirements for tomorrows processes is here today. We are committed to provide temperature control products with advanced and innovative technology, as well as offer world-class service for our customers’ satisfaction To be a leading global company that contributes to the stakeholder’s prosperity including customers, employees, suppliers, and stockholders, with our cutting-edge temperature control technology.
Capabilities and products
- -70°C to 200°C chiller operating range
- Galden heat transfer fluid for semiconductor
- HEX heat exchangers and chillers
- etcher-system chillers for wafer manufacturing
- semiconductor chiller service and repair
- ±1°C stable temperature control for wafer manufacturing processes