At a glance
| Booth | P5200 |
| Country | TW |
| Website | www.atschiller.com |
Company profile
Advanced Thermal Sciences Taiwan Corp., ATS, has more than 25 years of experience in the temperature-control industry and supplies highly reliable, compact and efficient temperature control systems. ATS is part of Collins Aerospace, whose aviation products include aircraft galley chillers, and the company presents that relationship as a foundation for its temperature-control business. Its headquarters is in Anaheim, California, while its temperature-control systems are installed at leading manufacturing facilities around the world. ATS states that thousands of its units are installed at leading semiconductor manufacturers and that it has grown through a series of acquisitions and mergers. The company manufactures HEX systems and chillers with an operating range from -70degC to 200degC and provides stable temperature control of +/-1 degC for wafer manufacturing processes. Its systems are used with etcher platforms including AMT, Lam, Mattson, Hitachi and KE, and ATS also specializes in chiller service and repair across the industry. ATS also specializes in sales of Galden heat-transfer fluid for semiconductor applications. The company describes its mission as providing temperature-control products with advanced technology together with service for customer satisfaction, while its stated values include customer orientation, innovation, achievement, diversity and teamwork, an enjoyable workplace, ethical global practice and environmental consideration. ATS presents itself as an integrated provider of temperature-control systems, combining technology, reliability, product offerings and service within one temperature-management portfolio.
Exhibits
ATS offers CO2 chillers, low-temperature and cryogenic chillers for -60C and colder, single-channel chillers and heat exchangers, and multiple-channel chillers and heat exchangers. Named product families include the CO2 Chiller GX Series, TCX Series, MC/MCR Series, ESH/NX Series heat exchangers, ENT Series, ESL Series and M-Pak Series. The GX Series uses CO2 as its refrigerant with GWP="1" and is presented as avoiding Freon refrigerant, refill cost, leak-check procedures and local Freon-gas tax concerns described for Europe. GX Series energy performance is stated as 20% better than MX-20 at -10C idling, and the cooling system is specified at 20L/min below +20C. GX Series configurations support up to 2 channels, with cooling capacity listed from 2.0kW@-10℃ up to 10kW@-10℃. The listed heater rating is 0KW, while pump capacity is specified from 20Lpm @ 58psi up to 30Lpm @ 87psi. The GX Series also emphasizes a small footprint, minimum process fluid, reduced power consumption in the L to M temperature zone under load, and minimum cooling-water requirements. Across the broader portfolio, ATS positions its temperature-control systems for semiconductor manufacturing facilities and for demanding wafer-process temperature control where stable cooling, heating, heat exchange and service support are required. GX Series variants include Green Mode, minimum process-fluid design and minimum cooling-water requirements, with the product page also noting reduced power consumption in the L to M temperature zone under load. The listed GX Series performance data is specified at 60Hz, and ATS requests separate consultation when 50Hz performance information is required.
Capabilities and products
- HEX and chiller manufacturing from -70degC to 200degC
- wafer-process +/-1 degC temperature control systems
- chiller repair service
- Galden heat-transfer fluid sales for semiconductors
- CO2 chillers
- low-temperature/cryogenic chillers
- single-channel chillers and heat exchangers
- multi-channel chillers and heat exchangers