At a glance
| Booth | J3246 |
| Country | TW |
| Website | www.advancedenergy.com |
Company profile
Advanced Energy Taiwan, Ltd. designs and manufactures highly engineered precision power-conversion, measurement, and control solutions for mission-critical applications and processes, building on decades devoted to power technology for global customers. For semiconductor manufacturing, Advanced Energy leads the market in plasma power delivery, temperature measurement, temperature control, and wafer-control technologies across critical etching, deposition, chamber cleaning, inspection, implantation, and annealing, and it delivers process-specific solutions through strategic partnerships, continuous innovation, and rapid design. Its semiconductor applications include burn-in testing, deposition, etch, electron-beam inspection, implant, RF-generator calibration, semiconductor test, and strip, with power-conversion solutions supplied to the global semiconductor market. Advanced Energy states that precise power control supports repeatable plasma behavior, stable thermal profiles, real-time diagnostics, yield improvement, lower variability and downtime, faster process development, recipe validation, and scaling of advanced semiconductor processes. Its power solutions are designed to meet SEMI F47 voltage-sag requirements through ride-through capability and low total harmonic distortion, and many products are modular and configurable for integration into existing semiconductor platforms, although some next-generation technologies can require specific platform capabilities or retrofits. Advanced Energy also provides 24/5 support with qualified engineers and describes global customer service and technical support as part of its semiconductor offering. Advanced Energy describes wafer-fab challenges as aging equipment, unpredictable power fluctuations, changing power-density and thermal-management requirements, continuous-uptime needs, and tight process tolerances, and states that its intelligent power systems adapt to dynamic loads and provide predictive insight to maintain stability and reduce downtime.
Exhibits
Advanced Energy's semiconductor portfolio includes RF, DC, and pulsed-DC products, impedance-matching networks, remote-plasma sources, and a data-collection, visualization, and analysis platform, with synchronized source-and-bias control and multi-level pulsing for etch applications. Featured plasma and RF products include MAXstream Remote Plasma Source for chamber cleaning; eVerest RF Generator; Paramount Plus RF Generator with multi-level pulsing and pulse-waveform control; Navigator II and NavX RF Match Networks for rapid digitally tuned or RF-synchronized matching; Ascent AP, AMS, and DMS pulsed and DC power systems; Pinnacle III DC Power Supply for processes at or below 20 kW; and eVoS LE and eVoS ME bias solutions for ion-energy and wafer-surface-voltage control. Electrostatic-chuck and high-voltage products include Trek 645 Series with 0 to ±2 kV output, Trek 645-HT Series with ±1 kV at 20 mA, Trek 646 Series with 0 to ±3 kV, Trek 2200 Series piezo drivers and high-voltage amplifiers at 40 W, Trek 623B Series with 0 to ±2 kV DC or peak AC, Trek 5/80-HS Series with 0 to ±5 kV DC or peak AC, and Trek 30/20A Series with 0 to ±30 kV DC or peak AC. Measurement and ESD products include Trek 158A charged-plate monitors, Trek 370 precision non-contact electrostatic voltmeters, Trek 520 hand-held electrostatic voltmeters, Sekidenko 401M single-channel non-contact temperature measurement with selectable emissivity, Luxtron M-1200 and M-1100 fiber-optic temperature converters, Sekidenko 4100T multi-channel optical-fiber pyrometers, Mikron MCL640 infrared cameras for -40 to 1600°C measurement, and 5540A Series RF Power Meters for high-power, high-accuracy RF measurement. Power-supply and controller products include NP08 up to 4000 W, iHP12/15 Air Cooled at 12 to 15 kW, CoolX1800 up to 1800 W fanless, uMP04 Gen II at 400 to 600 W, AA Series UltraVolt miniature PCB-mount regulated DC-DC converters, Thyro-XD SCR Power Controller, and Thyro-PX DC Power Controller, while the etch portfolio also lists NP05 configurable AC-DC power supplies up to 2400 W. For 200 mm semiconductor fabs using HDP/CVD tools, Opti RF Power Rack is optimized for power delivery, while Omni RF Diagnostic Cart is a comprehensive system for optimizing power delivery and precision RF-generator calibration. Advanced Energy's configurable power supplies can provide multiple DC outputs for electrostatic chucks, wafer handling, and IC testing and burn-in, with up to 8 separate outputs from 0.6 to 1000V and power ratings from 2000 to 30kW and higher, a software GUI for configuration and dashboards, and optional communications over Digital Ethernet UDP, RS485, CANBus, or Ethernet TC/IP. Artesyn configurable power supplies support single- and 3-phase inputs up to 600 VAC nominal, carry IEC/EN/UL 62368-1 safety approvals, comply with SEMI F47, and offer up to 94% efficiency and up to 18 W/in3 power density with low THD, ripple, and leakage performance. The iHP liquid-cooled platform provides up to 20 kW per 4U rack, and NeoPower carries industrial and medical safety approvals including SEMI F47 compliance, supports MODBUS RTU for control, monitoring, and configuration, and permits thousands of output combinations through series and parallel module connections with a configurable bus-bar system. Across deposition, etch, electron-beam inspection, implant, and related applications, the portfolio is positioned for precise plasma and thermal control, stable power delivery, accurate defect identification, ion-energy control, repeatability, and throughput in semiconductor equipment. Additional sensing and control details include Luxtron M-1100 fiber-optic temperature sensing for semiconductor etch and deposition from -200 to 450C, Sekidenko 4100T with configurable wavelength range, Trek 158A for evaluating air-ionization performance, Thyro-XD as a highly accurate and reliable SCR power controller, and Thyro-PX for DC-rectifier applications. For process performance, Advanced Energy states that electron-beam inspection products provide stable power for accurate defect identification in memory and logic devices, implant products optimize efficiency and power density for ion-energy control, and precision plasma power supports high-repeatability etch and defect-free wafer stripping. NeoPower is also described as streamlining multi-zone wafer-chuck heating with synchronized high-voltage outputs, replacing multiple supplies for precise and flexible ESC performance, while its configurable architecture supports fast prototypes and can reduce the need for custom or multiple standard power units. For advanced RF control, NavX provides ultra-fast RF-synchronized impedance matching across multi-level pulse states and is designed to reduce reflected power during shorter RF-on times when paired with eVerest, while Advanced Energy's pyrometer materials describe active ambient and emissivity compensation, contamination immunity, and robust designs for improving thermal-process repeatability. Within the pulsed and DC portfolio, Ascent AP is positioned for single- and dual-magnetron sputtering control, Ascent AMS for stable power delivery to highly repeatable films, and Ascent DMS for dual-magnetron sputtering accessories; Luxtron M-1200 is described as an accurate, compact fiber-optic temperature sensor, and the burn-in portfolio covers semiconductors, power supplies, and other critical electronics.
Capabilities and products
- semiconductor plasma power delivery
- RF, DC and pulsed-DC power products
- RF impedance-matching networks
- remote plasma sources
- non-contact temperature measurement for semiconductor processing
- semiconductor temperature control
- wafer control technologies
- power solutions for semiconductor burn-in testing
- high-precision plasma power for etch
- power and thermal control for deposition processes
- high-voltage power and control for electrostatic chucks
- non-contact electrostatic voltage measurement
- fiber-optic temperature sensing for semiconductor processes
- multi-channel optical-fiber pyrometers
- -40 to 1600°C infrared temperature measurement
- high-power RF power measurement
- SCR and DC power controllers
- multi-output configurable power supplies
- RF-generator calibration and power diagnostics