At a glance
| Booth | I2822 |
| Country | IL |
| Website | www.acsmotioncontrol.com |
Company profile
ACS Motion Control has worked in precision motion control since 1985, supporting advanced machines used in semiconductor fabrication, laser micromachining and electronics manufacturing. The company serves high-tech OEMs that require precision motion performance together with higher throughput and improved process performance. Its technology foundation combines servo-control algorithms, optimization tools, software-development libraries and an EtherCAT-based motion-control platform. ACS Motion Control positions itself as an engineering partner for OEM teams that need motion-control platforms able to integrate with machine architectures, adapt to different configurations and deliver repeatable performance. The organization is headquartered in Israel, has subsidiaries in the United States, Germany and China, and works through a global network of distributors and partners. Its SPiiPlus Platform is an EtherCAT-based control platform made up of motion controllers, servo drives, interfaces and I/O for OEM engineering teams developing precision motion systems. The platform is organized around performance for demanding precision-motion requirements, flexibility to control stages and motors from different suppliers, and scalability as machine complexity increases. The SPiiPlus architecture allows an OEM motion-control design team to configure a tailored control solution for each machine configuration. Unique control algorithms and performance-optimization tools are used to maximize motion-stage performance, while application-development tools and programming libraries support machine-feature development. The IDM Series provides DS402 EtherCAT servo drives for precision motion stages and combines servo-control algorithms, fast servo sampling and update rates, and advanced power-electronics techniques. IDM drives add flexible real-time programming and position-event generation and are offered in 1, 2 and 4 axes modules with DC or AC input selections and current selections up to 60A. The ECM Series integrates precision motion controllers and servo drives in a cost-optimized architecture for OEM machines where cost and space are constraints. ECM features include advanced motion-profile generation, flexible real-time multithreaded programming, motion-optimization tools and motion-to-process event synchronization, with 1, 2 and 4 axes module options and current selections up to 60A. Across the platform, ACS Motion Control's capability set includes application-development software, servo algorithms, servo-drive techniques, motion-profile planning and motion-to-process synchronization. These capabilities are intended to help OEMs raise precision-system performance and machine throughput, create scalable control solutions for varied machine configurations, and reduce development time. The company also offers Ace, a 24/7 multilingual website assistant that combines manuals, application notes and real-world support tickets into one interface for access to motion-control knowledge. Recent SPiiPlus ecosystem expansion is described as adding three new solutions for high-performance, cost-efficient precision motion in demanding OEM applications.
Exhibits
For semiconductor equipment, ACS Motion Control addresses requirements that include sub-micron accuracy, nanometer-level standstill jitter, millisecond-level settling and sub-microsecond trigger synchronization. Its semiconductor motion-control approach combines advanced servo and AI-based control algorithms, multi-axis EtherCAT-based control systems, motion-to-process synchronization and high-performance servo-drive electronics. Inspection applications include optical, X-ray, ultrasonic and e-beam inspection equipment. Metrology applications include critical dimension (CD), overlay and film-thickness measurement. Bonding and alignment applications include hybrid bonding, die bonding, LED bonding and silicon-photonics alignment. Other named semiconductor applications include maskless lithography, beam delivery, nanoprobing, vapor deposition, ion implant, and laser scribing and annealing. The supported precision-motion stage types include linear motor stages, direct-drive rotary stages, XY stages and XYZT stages. The stage-control scope also includes XY gantry stages, dual gantry stages, air-bearing stages, Z voice-coil stages, Z-Tip-Tilt stages and precision servo or stepper ballscrew stages. NanoPWM combines servo-drive and algorithm technology for sub-nanometer precision. Position Event Generation provides high-speed on-the-fly event triggering synchronized to precise positioning. Force Control provides precision force control with on-the-fly contact detection and is also presented as a feature for high-precision, high-throughput semiconductor advanced-packaging applications. Autofocus uses a dynamic autofocus algorithm to minimize tracking error and support optimal focus. ServoBoost is a servo-algorithm capability intended to improve motion-system performance. Dynamic Error Compensation is used for mechanical-accuracy compensation to address system imperfections. Smarter Gantry Control applies an advanced MIMO, or multi-input multi-output, gantry-control algorithm. At the platform level, the SPiiPlus system gives machine designers a way to tailor control for each configuration, optimize motion-stage performance, develop application software and synchronize motion with process events. IDM high-performance servo drives add optimization tools engineered for precision stages, while the ECM Series provides a cost- and space-conscious controller and drive architecture for precision-motion OEM equipment. The application-development stack includes programming libraries, servo-control techniques, motion-profile planning and motion-to-process synchronization so semiconductor equipment builders can combine controller, drive and software functions within one motion-control platform.
Capabilities and products
- high-precision motion control
- EtherCAT-based motion-control platform
- multi-axis EtherCAT control systems
- precision motion servo drives
- integrated motion controllers and servo drives
- motion-to-process synchronization
- precision position-event generation
- precision force control with contact detection
- dynamic autofocus control
- dynamic error compensation
- MIMO gantry motion control
- sub-nanometer precision motion control