At a glance
| Booth | P6118 |
| Country | SG |
| Website | www.tsi.com |
Company profile
TSI INCORPORATED is headquartered in Minnesota, USA and provides precision measurement solutions for semiconductor, electronics, pharmaceutical, and advanced manufacturing industries. Since 1961, TSI INCORPORATED has developed high-performance instruments intended to improve product quality, process control, and yield. MSP, a division of TSI, provides specialized semiconductor technologies that include advanced contamination control, wafer inspection, and precision liquid delivery systems. MSP products are used in CVD, ALD, and other critical process applications with an emphasis on accuracy, reliability, and ultra-clean performance.
Exhibits
For semiconductor ultrapure water, the TSI Nano LPM™ System is presented for true 10 nanometer (nm) nanoparticle detection. The semiconductor solution set also includes parts cleanliness testing down to 2 nm and particle detection in high-purity gases down to 2 nm. Airborne particle monitoring is listed for cleanrooms down to 10 nm, while Direct Liquid Injection (DLI) tools are offered for vapor delivery in thin-film deposition. Additional semiconductor offerings include particle removal efficiency (PRE) calibration standards down to 10 nm, single-particle CMP slurry analysis for slurry size distribution, and PRE Challenge Wafers for validating particle removal efficiency. The TSI OmniTrakTM Solution is a customizable, modular platform for facility managers, safety managers, and industrial hygienists who monitor air quality, noise, and dust across multiple locations. OmniTrakTM combines monitoring instruments with data insights through TSI LinkTM Report Creator and can measure multiple parameters from a single system to simplify data collection and accelerate reporting. The platform can begin with the required parameters and scale as needs change, while TSI LinkTM Report Creator converts results into visual reports. TSI condensation particle counters can measure particles down to 10 nm, and the product range also includes particle counters capable of detecting airborne particles down to 2 nm with reliable and repeatable measurements. The condensation-particle-counter lineup names the AeroTrak Cleanroom Condensation Particle Counter 9001 for accurate 10 nm measurements at low particle levels and the Versatile Water-Based Condensation Particle Counter 3789 for water-based particle concentration measurements. TSI Condensation Particle Counters use condensation technology to grow nanometer-sized particles into a detectable size range, enabling measurement of particles as small as 2 nm for advanced technology nodes where very small airborne contaminants can affect wafers. In cleanrooms, these CPCs provide visibility into ultrafine particles that standard optical particle counters may miss, supporting the identification and mitigation of contamination sources and helping improve process stability and product yield. The CPCs are engineered for stability and repeatability so their data can support filter testing, root-cause analysis, and routine monitoring in ultra-clean environments. By combining small-particle detection limits with repeatable data, the condensation-counter range is positioned for contamination-risk management by facility managers and process engineers. AeroTrak™+ A100 Portable Particle Counters provide real-time cleanroom particle counting and include built-in compliance support for ISO 14644-1:2015, ISO 21501-4:2018, EU GMP Annex 1 (2008 and 2022), and China GMP. The AeroTrak Portable Particle Counter 9110 is specified at a flow rate of 1 CFM (28.3 L/min) with ±5% accuracy and a particle size range of 0.100 to 10.0 µm. The AeroTrak-Plus Portable Particle Counter A100 Series covers flow rates from 1 CFM (28.3 LPM) to 3.5 CFM (100 LPM) and lists channel sizes from 0.3 µm to 10 µm. For classification work, AeroTrak™+ portable counters use an intuitive touchscreen and pre-configured sampling recipes, while their lightweight design and long battery life support extended movement through a facility. Integrated reporting tools can automatically generate pass/fail reports based on ISO 14644-1 and EU GMP Annex 1, reducing manual calculations and preparing documentation for audit use. The portable counters also support transfer of results to secure databases or Building Management Systems (BMS), enabling centralized trend analysis and use either as standalone troubleshooting instruments or within a larger monitoring strategy. TSI's Facility Monitoring System (FMS) is a monitoring software suite for particle counts and other parameters, with high-availability databases and hot-standby failover capabilities. FMS supports inputs that include airborne particle counters, temperature and humidity, differential pressure, air velocity, and digital inputs, and it accepts linear analog outputs from AeroTrak™ and AeroTrak™+ instruments. The product range includes the Facility Monitoring System with FMS Web Client, with OPC UA Client/Server functionality for monitoring particle counts and other parameters. The FMS uses an open architecture to collect, analyze, and store data from multiple environmental sensors, including remote particle counters and analog temperature or humidity sensors. Centralizing environmental data in FMS reduces manual data entry and provides a centralized record that supports data integrity and reporting for critical spaces. The monitoring system is designed to support ISO 14644-1 and EU GMP Annex 1 compliance, while hot-standby failover, distributed redundancy, real-time alerts, and reporting tools are used to reduce downtime and data gaps and address excursions quickly. AeroTrak™+ and AeroTrak Remote Particle Counters are compact fixed-monitoring instruments for large cleanrooms or critical environments, with wireless options, internal data buffering, ISO 21501-4 compliance, and a 5-year laser warranty. The AeroTrak-Plus Remote Particle Counter 7000 Series provides 0.1 CFM (2.83 L/min) and 1 CFM (28.3 L/min) flow-rate options with channel sizes from 0.2 to 25 μm. The AeroTrak-Plus Remote Particle Counter with Integrated Pump 6000 Series is specified at 0.1 CFM (2.83 L/min), channel sizes from 0.2 to 25 μm, and an integrated pump. The AeroTrak Remote Particle Counter with Integrated Pump 6310 operates at 1 CFM (28.3 L/min) with a particle size range of 0.3 to 25 μm, while the 6510 and 6510-VHP models operate at 1 CFM (28.3 L/min) over 0.5 to 25 μm and include an integrated pump with a VHP option. The AeroTrak Remote Particle Counter 7110 is specified at 1.0 CFM (28.3 L/min) with a particle size range of 0.100 to 10.0 µm. For continuous monitoring, fixed AeroTrak™ remote counters send an ongoing stream of data to FMS so particle excursions can be detected and trends, maintenance needs, and contamination events can be addressed before they affect product quality. During a network failure or system outage, extensive internal buffering allows a remote counter to keep collecting and storing data locally and to upload that data automatically when the connection is restored. Compact form factors support installation near critical process points, and wireless connectivity or Power over Ethernet (PoE) options can simplify installation while the 5-year laser warranty supports long-term use.
Capabilities and products
- Monitoring of 10 nm nanoparticles in ultrapure water
- Parts cleanliness measurement down to 2 nm
- Particle detection down to 2 nm in high-purity gases
- Direct liquid injection and vapor delivery for thin-film deposition
- 10 nm calibration standards for wafer surface scanning and inspection
- Single-particle size distribution analysis of CMP slurry
- PRE challenge wafers for particle removal efficiency testing
- Wafer inspection technology
- Condensation particle counters with detection down to 2 nm and water-based options
- Portable particle counters for cleanrooms
- Remote continuous particle counters for cleanrooms
- Integrated cleanroom particle and environmental parameter monitoring software
- Multiparameter monitoring platform for air quality, noise and dust