At a glance
| Booth | P6118 |
| Country | SG |
| Product categories | Particle Monitors; Analyzers - Airborne or Liquid · Environmental; Utility Systems & Monitoring · Gas Monitoring Equipment; RGA's; TGO compliance · Clean Rooms · Contamination Control; HEPA Filtering Systems · HVAC; Temperature; Humidity Systems and Control · Clean Room; Contamination Control |
| Website | www.tsi.com |
Company profile
TSI Incorporated & MSP – A Division of TSI TSI Incorporated, headquartered in Minnesota, USA, is a global leader in precision measurement solutions supporting semiconductor, electronics, pharmaceutical, and advanced manufacturing industries. Since 1961, TSI has been developing high-performance instruments that help improve product quality, process control, and yield. MSP, a division of TSI, delivers specialized technologies for the semiconductor industry, including advanced contamination control, wafer inspection, and precision liquid delivery systems. MSP products are widely adopted in CVD, ALD, and other critical process applications for their accuracy, reliability, and ultra-clean performance. Discover the Future of Semiconductor Innovation Nanoparticle Monitoring in Ultrapure Water — TSI Nano LPM™ System for true 10 nanometer (nm) nanoparticle detection in semiconductor ultrapure water (UPW) Parts Cleanliness Testing — Ensure reliability with precise cleanliness evaluations down to 2 nm Particle Detection in Hugh-Purity Gases — Reliable and repeatable measurements down to 2 nm Airborne Particle Monitoring in Cleanrooms — Advanced systems for monitoring airborne particles as small as 10 nm Vapor Delivery Solutions — Optimize thin-film deposition with our advanced Direct Liquid Injection (DLI) tools Particle removal efficiency (PRE)Calibration Standards — Support for surface scanning and inspection tool calibration down to 10 nm CMP Slurry Analysis — Gain single-particle insights for precise slurry size distribution. PRE Challenge Wafers — Validate particle removal efficiency with confidence. Visit us to explore our advanced solutions for precision, quality control and reliability in semiconductor manufacturing to ultimately increase yield.
Capabilities and products
- CMP slurry analysis for single-particle size distribution
- Direct Liquid Injection (DLI) vapor delivery tools for thin-film deposition
- TSI Nano LPM™ 10 nm nanoparticle detection in semiconductor UPW
- advanced contamination control technologies for semiconductor manufacturing
- cleanroom airborne particle monitoring as small as 10 nm
- high-purity gas particle detection down to 2 nm
- particle removal efficiency (PRE) calibration standards down to 10 nm
- parts cleanliness testing down to 2 nm
- precision liquid delivery systems
- wafer inspection technologies