At a glance
| Booth | L0020 |
| Country | TW |
| Website | www.trelleborg.com/en/seals |
Company profile
Trelleborg Sealing Solutions Taiwan Co. Ltd offers products ranging from versatile elastomer O-Rings to complex multi-faceted PTFE-based and polyurethane geometries, and can develop a specific product when standard options do not fit an application. Trelleborg Sealing Solutions Taiwan Co. Ltd is a leading global supplier of sealing solutions whose broader portfolio includes O-Rings, hydraulic seals, rotary shaft seals, oil seals, static seals, pneumatic seals, and mechanical face seals. Local specialist support, global reach, and dedicated regional semiconductor experts provide best-in-class service from design and prototype through delivery and serial production, while industry-leading design support and digital tools help accelerate performance. High-performance seals provide cleanliness, chemical resistance, and extended uptime cycles for maximum yield, while high-purity Isolast® PureFab™ FFKM materials provide extremely low trace-metal content and particle release together with low plasma erosion, high-temperature stability, resistance to dry and wet process chemistries, and sealing performance that lowers total cost of ownership. All Isolast® PureFab™ seals are produced and packed in a Class 100 (ISO5) cleanroom environment. The company serves industries including Fluid Power, Food & Beverage, Medical Solutions, Semiconductor Manufacturing, Oil & Gas, Aerospace, Construction, Mining & Agricultural Equipment, and Manufacturing & Automation, and provides resources such as a technical library, area and volume calculator, CAD service, O-Ring calculator, sealing-solutions configurator, chemical-compatibility check, e-learning, films, and animations.
Exhibits
O-Rings are widely used because of their flexibility, ease of use, and inexpensive production methods, and in static applications they can serve as a single sealing element or as energizing elements for two-component seals and wipers. Trelleborg Sealing Solutions Taiwan Co. Ltd can bond elastomer materials, including Isolast® PureFab® Perfluoroelastomers, to stainless steel, mild steel, aluminum, and various plastic substrates to maximize seal integrity while supporting easier assembly, reduced inventory, and cost-effective sealing solutions. Field-proven Turcon® Variseal® spring-energized seal variations are suited to demanding semiconductor applications including high vacuum and corrosive environments, and the Turcon® flange-seal design prevents contact between the energizing spring or spring cavity and system media while operating in vacuum and having been proven in fluorine gas. The Isolast® PureFab® range is intended for aggressive front-end processes including deposition, etch, ash/strip, plasma cleaning, and thermal processing such as atomic layer deposition, with high-temperature stability, high purity, exceptionally low trace-metal content, plasma resistance, reduced particle generation, ultra-low outgassing in high vacuum, extended maintenance cycles, and Class 100 (ISO5) production and packing. Isolast® PureFab® JPF10 uses a fully organic formulation for demanding high-temperature applications, provides fluorine and oxygen radical plasma resistance, low particle generation, high-temperature stability over +300°C, chemical resistance including steam and amines, and suitability for dry etching, stripping, and remote plasma cleaning. Isolast® PureFab® JPF20 uses an advanced nanoparticle filler system for minimal particle generation, maximum resistance to aggressive ion- and radical-rich plasma chemistries, high-temperature stability to +320°C, and use in all etch processes and critical tool locations requiring extreme plasma resistance. Isolast® PureFab® JPF21 provides oxygen-plasma resistance and dimensional stability, minimum particulation in NF3 plasma, sealing-force retention over long durations even above +300°C, and suitability for etch, deposition, and diffusion processes. Isolast® PureFab® JPF22 combines mechanical reinforcement with extremely low leachables according to SEMI F40/F57, resistance to aggressive amine-based chemicals, low trace-metal content, compatibility with common dry-process gases, and minimum particulation and weight loss across a wide range of plasma-process gases. Isolast® PureFab® JPF30 is a non-filled translucent high-purity material with extremely low trace-metal content, thermal stability even at +300°C, and suitability for ash and strip processes and applications requiring low sealing force. Isolast® PureFab® JPF40 is an ultra-high-temperature perfluoroelastomer for demanding subfab applications, with low compression set over long periods, thermal stability up to +327°C/+620°F, low outgassing, very low trace-metal contamination, compatibility with common dry-process gases, and low particulation and weight loss in plasma-process gases. FlexiMold™ technology manufactures high-precision large-diameter O-Rings and other seal profiles without a dedicated tool, with flexible tooling to reduce lead times and costs; it is recommended for O-Rings and other profiles over 600 mm/23 inches, supports ISO 3601-1, AS568, and JIS B 2401, and can produce almost all diameters with no tooling charge for standard O-Ring cross sections. Semiconductor sealing material options include Isolast® PureFab® Perfluoroelastomer (FFKM), Resiflour™ PureFab® premium Fluoroelastomers for high purity and low trace-metal content, and other Fluoroelastomer (FKM) grades for less aggressive process chemistries; seals follow a zero-defect quality policy with individual packaging and labeling, while Class 100 (ISO 5) cleanroom washing and packing and express delivery are available. Large O-Rings and seals are used across semiconductor applications, including Flat Panel Display production, and additional product choices include High-Performance O-Rings, Engineered Molded Parts, Multi-component Parts, Turcon® Varilip® PDR, Turcon® Variseal®, Advanced Composites, and thermoplastics.
Capabilities and products
- semiconductor elastomer O-Rings
- complex PTFE and polyurethane seal geometries
- custom sealing-product development
- Isolast PureFab FFKM high-purity sealing materials
- Turcon Variseal spring-energized seals
- semiconductor sealing for high-vacuum and corrosive environments
- large-diameter O-Rings and seal profiles over 600mm
- Resiflour PureFab high-purity FKM sealing materials
- PFAS-free materials
- engineered molded parts
- multi-component sealing parts
- Turcon Varilip PDR seals
- advanced composites