At a glance
| Booth | S7352 |
| Country | TW |
Company profile
THK Taiwan Co., Ltd. is the Taipei-based Taiwan entity of THK, which first commercialized the Linear Motion (LM) Guide in 1972 and supplies linear-motion components for semiconductor equipment. For cleanroom and vacuum process environments it offers LM Guide models for special environments, including the Clean-Room Actuator CSKR (CSKR20 and CSKR26 built on Caged Ball technology), certified to ISO 14644-1 Class 3 cleanliness with a dedicated cover and dust-suction system, and the medium-to-low-vacuum LM Guide HSR-M1VV, usable from atmospheric pressure down to 10^-3 Pa with a labyrinth end seal and vacuum-grade grease. Its low-dust-generation CGL structure further reduces particle generation for cleanroom motion, and its vacuum and clean-environment guides use corrosion-resistant stainless steels (SUS304 rails, SUS431 blocks and balls). The company is positioned as a supplier of cleanroom and vacuum-compatible linear-motion and positioning components for wafer stages and semiconductor equipment.
Capabilities and products
- CSKR20 and CSKR26 Caged Ball linear actuators
- Clean-Room Actuator CSKR for cleanroom motion
- HSR-M1VV medium-to-low-vacuum LM Guide
- ISO 14644-1 Class 3 cleanroom actuator with dust-suction cover
- Linear Motion (LM) Guide components for semiconductor equipment
- linear-motion and positioning components for wafer stages
- low-dust-generation CGL structure for cleanroom motion
- stainless-steel clean-environment guides with SUS304 rails and SUS431 blocks
- vacuum LM Guide usable from atmosphere to 10^-3 Pa