At a glance
| Booth | J2554 |
| Country | TW |
| Product categories | Wafers · Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers) |
| Website | www.kanken-techno.co.jp/e_index.html |
Company profile
Kanken Techno is located in Kyoto where is the birthplace of the Kyoto Protocol and is enjoying the leading anti-air pollution equipment company in Japan. Our various patented abatement technologies can apply for almost all hazardous gases and PFC gases from semiconductor, LCD and PV factories with high DRE. Our abatement system (Local Scrubber) requires electricity, water and N2 only. Our abatement system (Local Scrubber) can treat CF4, SF6, C2F6, C3F8, N2O,NF3, etc., which are known as PFC gases with 90%[*1] or more of DRE based on IPCC guide line 2006. If customer requires, we would guarantee higher DRE[*2 ]. We will surely contribute to your environmental protection measures. [*1] NF3 is 95% or more [*2] Subject to discuss detailed gas recipe etc.
Capabilities and products
- 90% or higher DRE gas abatement based on IPCC 2006 guidelines
- Local Scrubber abatement systems
- PFC gas treatment for CF4, SF6, C2F6, C3F8, N2O and NF3
- hazardous-gas and PFC-gas abatement for semiconductor factories
- patented gas abatement technologies