At a glance
| Booth | J3255 |
| Country | CN |
| Product categories | Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD · Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE) |
| Website | www.naso-tech.com/about.html |
Company profile
Shenzhen Naso Tech Co., Ltd. is a China based advanced semiconductor manufacturing equipment company, established in 2018. Its core team includes members from the University of Cambridge and well-known industry firms, and the company is experienced in advanced semiconductor manufacturing equipment including CVD, MOCVD, ALD and ETCH. It is mainly engaged in the research, production and sales of high-end thin-film deposition equipment needed for third-generation semiconductor silicon carbide, new photovoltaic materials and nanomaterials. Its products include a silicon carbide epitaxial reactor used in the core process of wide-bandgap semiconductor silicon carbide chip production, using a horizontal hot-wall technology route for single-wafer epitaxial growth.
Capabilities and products
- ALD semiconductor manufacturing equipment
- CVD semiconductor manufacturing equipment
- ETCH semiconductor manufacturing equipment
- MOCVD semiconductor manufacturing equipment
- epi reactors and epitaxy equipment
- horizontal hot-wall single-wafer epitaxial growth
- silicon carbide epitaxial reactor
- thin-film deposition equipment for SiC, photovoltaic materials and nanomaterials