At a glance
| Booth | Q5843 |
| Country | TW |
| Website | www.pasco-precision.com |
Company profile
Pasco Precision Corp was founded in 2006 and relocated to the Tainan Science Park in 2014, while its operating footprint is described as spanning Taiwan and Shanghai. The company develops, manufactures, designs and distributes critical parts for TFT-LCD and semiconductor process equipment, with particular emphasis on components and consumables used in CMP, or chemical mechanical planarization, and with additional development activity in ECP, or electroplating, processes. Its manufacturing capabilities combine more than 15 years of mass-production experience in 200 mm and 300 mm CMP Membranes with silicon-rubber molding and precision machining of engineering plastics, PU and metals. Materials handled across its critical-part work include Silicon, EPDM, metal, ceramic and engineering plastics such as PEEK, POM, PET, PTFE and VESPEL. Pasco Precision Corp states that its full process is produced in Taiwan through an in-house, one-stop production line that supports custom molding and precision-machined components in multiple materials. Its role extends beyond parts manufacturing to consulting for equipment start-up and troubleshooting, including modification of unusable or inefficient parts, as well as labor services such as retrofitting. Technical support also includes collaborative development, rapid troubleshooting and continuous improvement program, or CIP, work aimed at resolving process problems for customers. The company reports that its products are adopted by global Tier 1 wafer-fabrication leaders and that it works as a strategic partner for major customers in Europe and the United States. Its technology positioning is built around continuous R&D for advanced processes, proprietary products, material expertise and the ability to combine molding, machining and process support within the same organization. For 2024, Pasco Precision Corp completed a greenhouse-gas inventory reporting total emissions of 319.228 metric tons of CO2 equivalent, including 21.8774 tCO2e of direct emissions, 241.4196 tCO2e of energy indirect emissions and 55.9306 tCO2e of other indirect emissions from the use of products. Electricity consumption was identified as the largest emission source, accounting for 76% of total emissions in that inventory.
Exhibits
Pasco Precision Corp supplies Semiconductor Parts, CMP Membrane Refurbish services and CMP Rolling Seal products, including an Upper Rolling configuration for CMP equipment. Its CMP membrane offering includes Titan 1 Membrane for 200 mm applications and Titan 2 Profiler Membrane for 200 mm applications, providing named membrane options within the CMP consumables line. The product range also identifies AMAT CMP Parts and EBARA CMP Parts for CMP process equipment. For refurbishment and replacement needs around CMP systems, the company combines membrane refurbishment with CMP Rolling Seal supply rather than limiting its offering to newly manufactured parts. Rubber products are available in SILICONE and VITON, while machined-part material categories include Engineering Plastic, SUS304, SUS316 and AL. These products sit within a broader critical-part capability that also works with Silicon, EPDM, metal, ceramic, PEEK, POM, PET, PTFE and VESPEL for semiconductor and TFT-LCD process equipment. The CMP and semiconductor-part supply is supported by in-house molding and precision machining, allowing custom components to be produced across engineering plastics, PU and metal materials. For equipment use, Pasco Precision Corp can pair the parts with start-up support, troubleshooting, modification of inefficient or unusable parts, retrofitting labor and CIP-based technical support. The combination of CMP Membranes, membrane refurbishment, rolling seals, AMAT and EBARA CMP parts, material-specific machined parts and process-support services addresses maintenance, replacement and process-improvement needs in semiconductor CMP environments.
Capabilities and products
- Mass production of 200/300 mm CMP membranes
- Custom silicone rubber molding
- Precision machining of engineering plastics
- Precision machining of PU
- Precision metal machining
- R&D and manufacturing of ECP process consumables and components
- CMP membrane refurbishment
- CMP rolling seals
- Supply of CMP parts (AMAT, EBARA)
- VITON rubber products
- Process-equipment parts modification and retrofitting services