At a glance
| Booth | I2225 |
| Country | TW |
| Website | www.pmeasuring.com/industry/semiconductor-microelectronics |
Company profile
Particle Measuring Systems Inc. (PMS), a subsidiary of Spectris plc, is a global technology company focused on contamination monitoring. Its work covers contamination monitoring solutions for semiconductor and microelectronics manufacturing as well as other clean-manufacturing environments. With more than 50 years in the industry, PMS develops products intended to help clean manufacturers meet regulatory demands, protect yield and use critical data for faster operational decisions. The company combines contamination-monitoring technology with a global service organization for clean manufacturing applications. Its global support model includes direct sales and service in major markets, a worldwide network of Application Engineers, regional technical expertise, training, calibration, repair and responsive application support. PMS states that its solutions are used across advanced fabs and high-tech manufacturing facilities worldwide, with regional presence intended to provide the training and operational support required by local teams.
Exhibits
For semiconductor and microelectronics production, Particle Measuring Systems Inc. provides real-time contamination monitoring intended to reduce contamination, protect yield and improve process control. The monitoring range covers air and gas, ultrapure chemicals and water, and airborne molecular contamination (AMC), with data captured at the point and time where contamination occurs. PMS states that its particle-detection portfolio provides high-sensitivity detection across critical media and supports cleanroom air, high-purity gas lines, ultra-pure chemicals and DI water or UPW. Its contamination-monitoring products include remote and portable particle counters for air, liquid, water, chemical and gas applications, along with facility and environmental monitoring systems. The Taiwan product range also includes liquid particle counters, microbial air samplers, airborne particle counters, airborne molecular contamination monitors and gas particle counters for cleanroom monitoring. Related semiconductor products include the NanoAir™ 10 condensation particle counter and the Ultra DI® DI-water particle counter. For liquid contamination monitoring, PMS lists the Chem 20™ 20 nm chemical particle counter, HSLIS cost-effective liquid particle counter and LiQuilaz® II Series liquid particle counter. For airborne contamination, related products include the Lasair® III 110 airborne particle counter and AirSentry® II airborne molecular contamination monitoring system. PMS application resources include a 20 nm Chemical Batch Sampling Solution, nanoparticle contamination in UPW systems, liquid particle counting troubleshooting, particle-monitoring strategies for 300 mm fabs and particle control for semiconductor chemical suppliers. The company provides tailored contamination-monitoring solutions for systems with different requirements and supports monitoring-system accuracy through calibration, repair and service activities. Its real-time data model is designed to help fabs and high-tech manufacturing facilities act on contamination information where it is generated rather than relying only on later inspection. Across these products and services, PMS links high-sensitivity particle detection, air and gas monitoring, ultrapure chemical and water monitoring, AMC monitoring and real-time semiconductor process control in one contamination-monitoring portfolio.
Capabilities and products
- semiconductor and microelectronics contamination monitoring
- ultrapure chemical and UPW liquid particle counting
- air and gas contamination monitoring
- ultrapure chemical and water contamination monitoring
- airborne molecular contamination (AMC) monitoring
- condensation particle counters
- DI-water particle counters
- 20 nm chemical particle counting
- airborne particle counters
- liquid particle counters
- contamination-monitor calibration and repair