Maruyama Chiller Corporation

Exhibitor at SEMICON Taiwan 2026 · Booth N0285

Booth N0285Country JP5 product topics
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BoothN0285
CountryJP
Websitewww.maruyama-ss.co.jp
Exhibitor profile

Company profile

Maruyama Chiller Corporation was established in 1969 and states a management philosophy of pursuing the highest level of manufacturing technology, producing products that can serve global markets, contributing to society, and responding quickly and accurately to changing conditions. The company identifies temperature-control technology as the core of its business in semiconductor and LCD-related fields and industrial equipment, and describes its operating approach as responding flexibly and accurately to customer needs while providing assurance and trust. Its business includes design, manufacturing, and sales-related work for semiconductor and LCD manufacturing equipment, industrial equipment, and electronic equipment, and it also identifies the design and manufacturing of strain-gauge measuring instruments and strain-gauge data-acquisition devices as major activities. Maruyama Chiller Corporation states that it seeks to understand customer requirements together with legal and other societal requirements, improve management and technical skills, and manufacture products suited to customer needs with company-wide attention to product quality. Its quality-management approach includes building a quality management system, pursuing continuous improvement, setting action-based quality objectives across departments, reviewing progress, communicating the policy to personnel and people working for the company, and maintaining its suitability through management review. On environmental management, the company states that its manufacturing equipment, devices, and facilities are used at customer sites to produce environmentally considerate products, and that it works to reduce environmental burden both in its own manufacturing processes and at customer sites while helping customers produce high-function products with lower environmental impact. The company identifies and evaluates the environmental effects of its activities, products, and services, determines significant environmental aspects, and addresses them through continuous improvement, pollution prevention, and compliance with legal and other requirements while allocating management resources. For items targeted for continuous improvement, it sets objectives and targets, prepares and implements environmental improvement plans, evaluates results and revises them for the next improvement cycle; listed initiatives include reducing residual materials and waste, saving electricity, and promoting factory beautification through 5S activities.

Exhibitor profile

Exhibits

The Triple Chiller is a three-channel chiller sold to end users, allowing one chiller to manage three different temperature controls and thereby reduce installation area and infrastructure costs such as piping and power requirements. Because its control system is unified, the three-channel design can perform temperature control while considering thermal interaction among channels, which the company states can improve process stability. The Triple Chiller contains three cooling units, provides higher cooling capacity than the Dual Chiller, is used for large facilities needing high cooling capacity or cases requiring especially high reliability, and allows more flexible cooling operation by combining multiple units. The Dual Chiller is a two-channel model sold to semiconductor-manufacturing-equipment OEMs and end users; one unit manages two different temperature controls to reduce installation area and infrastructure costs, and its two cooling units provide higher cooling capacity than the Single Chiller. For redundancy, the Dual Chiller can continue cooling with the remaining unit if one cooling unit fails, and it can operate one or two cooling units according to cooling load to enable energy-saving operation. The Single Chiller has one channel and is supplied mainly to semiconductor-manufacturing-equipment OEMs; it uses one cooling unit, has a comparatively simple structure intended to make installation and maintenance easier, has lower cooling capacity than the other listed chiller types, and is used where smaller-scale cooling is required. The product information lists temperature-control ranges of CH-1: -45 to +40℃, CH-2: +10 to +70℃, and CH-3: +40 to +90℃, together with coolant types SF10, HT135, and CF2, giving the listed chiller family three distinct temperature-control bands and three named coolant options. Listed cooling capacities are CH-1: 6kW at -40℃ and 9kW at -20 to 40℃, CH-2: 9kW at 10 to 70℃, and CH-3: 3kW at 40 to 90℃; the page also specifies R32 refrigerant with GWP 675 and 3-phase 400V power. Maruyama Chiller Corporation also states that it custom-builds energy-saving chillers from high temperature to ultra-low temperature, with high precision and high quality, allowing temperature-control equipment to be tailored beyond the standard single-, dual-, and triple-channel configurations.

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