At a glance
| Booth | Q5343 |
| Country | TW |
| Website | www.honeywell.com/us/en/industries/manufacturing/semiconductor |
Company profile
Honeywell Taiwan Limited represents Honeywell, a Fortune 100 software-industrial company whose industry-specific offerings include aerospace and automotive products and services, control technologies for buildings, homes and industry, and performance materials delivered globally. Honeywell describes its technologies as connecting aircraft, cars, homes and buildings, manufacturing plants, supply chains and workers in support of smarter, safer and more sustainable operations. Honeywell Industrial Automation (IA) draws on more than five decades of industrial-automation history and works across process-industry operations, sensor technologies, supply-chain automation, smarter warehouses and worker safety. For semiconductor manufacturing, the offering is framed around advanced automation, near-real-time gas-hazard detection and monitoring of hazardous process gases across fabs and sub-fabs.
Exhibits
Honeywell's semiconductor manufacturing solutions combine integrated automation with cleanroom and safety functions to protect people and assets while supporting yield, process improvement and cleanroom integrity from the fab floor through exhaust systems. Because semiconductor fabrication uses toxic and flammable gases in steps including chemical vapor deposition, doping and oxidation, Honeywell provides toxic-gas detectors and controllers for hydrides, trifluorides and other hazards, including multi-point Chemcassette® tape-based detection, fab-to-sub-fab and exhaust-system integration, and parts-per-billion sensitivity for early hazard identification. The 13MM Pressure Sensor is described as designed for cleanroom environments and high-purity manufacturing, providing precise measurement with accurate performance under high-pressure and high-temperature conditions and minimal offset drift, including across gases commonly used in semiconductor manufacturing. Honeywell states that its cleanroom-rated sensors are intended to maintain process integrity and help wafer features adhere to precise specifications while reducing contaminants and defects in high-purity fabrication environments. Its semiconductor automation portfolio also includes toxic-gas monitoring systems with up to nine Chemcassette® gas analyzers, PLC-based toxic-gas monitoring systems with Midas detectors, process-control platforms that provide visibility across operations, and quality-control systems intended to maintain consistent production standards from the fab floor to finished products. Gas detection is positioned as necessary across semiconductor plants from fabs and sub-fabs to exhaust systems and control centers, with near-real-time monitoring intended to detect leaks or abnormal concentrations so personnel can respond while maintaining process integrity. The dedicated semiconductor gas-detection portfolio is specified for toxic and flammable gases across high-tech and semiconductor environments and combines parts-per-billion Chemcassette® colorimetric systems with parts-per-million electrochemical sensing for hydrides, trifluorides and other process gases. For multi-point monitoring, the portfolio includes systems for cleanrooms and sub-fabs, Chemcassette® at ppb detection levels, electrochemical cartridges at ppm levels, and integration with high-tech automation, monitoring and control infrastructure for centralized visibility and control. Honeywell lists centralized monitoring of up to 40 measuring points together with near-real-time data visualization and alerts and remote control or viewing software as functions of its gas-monitoring architecture. Its advanced sensing options include Chemcassette® colorimetric technology, electrochemical cartridge sensors, catalytic-bead detection, infrared detection and multi-gas monitoring, with coverage extending to hydrides, trifluorides and hundreds of semiconductor process gases. For scale, Honeywell describes architectures ranging from single-point detectors to multi-point networks with up to 72 monitoring locations, supporting high-volume fabs and EUV processes, with up to 9 analyzers per system and 8 detection points per analyzer. Chemcassette® paper-tape technology is specified for ppb sensitivity, while the Midas-M 4-in-1 multi-gas detector is stated to monitor more than 30 different gases and Vertex™ Edge supports up to 72 detection points using 9 Chemcassette® analyzers that each monitor 8 locations. The semiconductor gas-detection range covers process gases including arsine, phosphine, silane and fluorinated compounds, using ppb colorimetric and ppm electrochemical technologies to identify hazardous concentrations before they affect production or safety. Gas-detection systems can integrate with building-management systems, automation platforms and SCADA infrastructure through standard protocols, while centralized platforms provide distributed sensing with central control for managing detectors across fabs and sub-fabs from one interface. The ACM 150G2 is identified as an FTIR-based centralized system for monitoring multiple gases from a single analyzer with outputs connected to a facility monitoring network, complementing the broader portfolio of distributed and multi-point sensing.
Capabilities and products
- 72-point ppb-level paper-tape colorimetric gas monitoring systems
- ppm-level electrochemical gas sensors
- catalytic-bead gas detection
- infrared gas detection
- FTIR multi-gas monitoring systems
- gas detection system integration with BMS/SCADA
- remote monitoring and control software for gas detection
- pressure sensors for high-purity cleanroom processes
- PLC-based toxic-gas monitoring systems
- semiconductor process-control platforms
- semiconductor production quality-control systems
- aerospace products and services
- automotive products and services
- building and home control technologies
- performance materials
- supply-chain automation
- smart warehousing
- 4-in-1 multi-gas detectors for more than 30 gases
- detection of semiconductor hydride and trifluoride gases