At a glance
| Booth | S7540 |
| Country | JP |
| Website | www.hitachi-hightech.com |
Company profile
Hitachi High-Tech Corporation is a Japan-based technology company active in semiconductor, analytical, medical, industrial, and IT-related systems. Its business segments include Nanotechnology Solutions, Analytical Solutions, and Industrial Solutions, and its semiconductor manufacturing equipment includes etching systems and technologies based on electron-beam, optical, and plasma control. Its portfolio includes FE-SEM, C-SEM, FIB, TEM, Nano-prober, and Ion Milling systems, together with SEM products and applications for semiconductor back-end processes and the EMFC automatic observation function.
Exhibits
Hitachi High-Tech features EMCP (Electro Magnetically Coupled Plasma) with integrated cleaning technology for non-volatile material etch. EMCP supports highly productive etching of non-volatile materials used for next-generation memories and thin-film heads for HDD (Hard Disk Drive). Microwave ECR plasma provides a wide process window in both R&D and mass production through accurate plasma-parameter management, including plasma-distribution and plasma-position control. The same plasma-control technology is also applied to dry cleaning to maintain a more stable chamber condition. The semiconductor back-end offering also includes SEM products and applications and the EMFC automatic observation function.
Capabilities and products
- non-volatile material etching with integrated cleaning
- microwave ECR plasma process
- plasma dry cleaning
- SEM applications for semiconductor back-end processes
- FE-SEM / C-SEM systems
- FIB systems
- TEM systems
- Nano-prober systems
- ion milling systems