At a glance
| Booth | Q5152 |
| Country | CN |
| Website | www.cobetter.com.cn/applications/microelectronics/semiconductor |
Company profile
Hangzhou Cobetter Filtration Equipment Co., Ltd. is the Hangzhou-based entity behind Cobetter's filtration and fluid-management business and supplies filtration, purification, separation, fluid and packaging solutions for the integrated-circuit industry chain. Cobetter was founded in 2003 and focuses on research and development of filtration, separation and purification membrane materials together with fluid-management systems. The company's solution markets include global integrated-circuit manufacturing, biopharmaceuticals, industrial applications and new-energy fields. Cobetter also engages in membrane-material R&D and provides filtration, separation and purification solutions as part of the same fluid-management business. For semiconductor use, the company positions itself as a process-filtration, membrane and fluid-management supplier relevant to fab chemicals, gases and process fluids. The filtration categories associated with the company include liquid, oil and gas filters. Within integrated circuits, Cobetter states that its solutions extend across the industry chain from crystal pulling and large-silicon-wafer production through chip manufacturing and chip packaging.
Exhibits
Cobetter states that reducing the number of defects in integrated-circuit production raises product yield and thereby improves integrated-circuit reliability, making yield improvement a continuing concern for the industry. Its semiconductor offering applies filtration, purification, separation, fluid and packaging solutions from crystal pulling to large-wafer production, from wafers through chip manufacturing, and into chip packaging. At the fab-utility and delivery-system level, the company provides solutions covering ultrapure-water systems, chemical-delivery systems, slurry-delivery systems and gas systems, placing filtration and purification functions around the fluids and gases feeding semiconductor production. The ultrapure-water system is therefore part of Cobetter's integrated-circuit filtration and purification scope, supporting facility-side water treatment within the semiconductor manufacturing environment. Chemical, slurry and gas delivery are also within the same filtration and purification solution range through the listed chemical-delivery, Slurry-delivery and gas-system applications. At the process-tool side, the company lists thin-film deposition, photolithography, chemical mechanical polishing (CMP), wet etching and cleaning, electrochemical plating or ECP, and ion implantation as covered process points. CMP is explicitly identified as a semiconductor application, and within the company's stated integrated filtration, purification and separation offering it is one of the process areas served by Cobetter solutions. Wet etching and cleaning are likewise explicitly identified semiconductor applications, placing filtration and purification support at another critical process stage alongside photolithography, deposition, plating and ion implantation.
Capabilities and products
- ultrapure water system solutions for semiconductors
- chemical delivery system solutions for semiconductors
- slurry delivery system solutions
- semiconductor gas system solutions
- filtration solutions for integrated circuits
- purification solutions for integrated circuits
- separation solutions for integrated circuits
- packaging solutions for integrated circuits