At a glance
| Booth | N0034 |
| Country | TW |
| Website | www.ferrotec.com.tw |
Company profile
Ferrotec Taiwan Co., Ltd. was established in Taiwan on September 19, 2006 by Japan's Ferrotec Holdings Corporation; the group headquarters are in Tokyo, and the broader organization is identified with a 40-year history. Its main served product areas are quartz products and silicon products, together with magnetic-fluid vacuum feedthrough components used in semiconductor equipment and LCD-panel equipment. The Taiwan operation groups its technology and products into semiconductor-equipment business, electronic-device business, automotive-related business and other related business. The semiconductor-equipment portfolio includes vacuum sealed feedthroughs, quartz products, precision ceramics, silicon-material parts, CVD-SiC, machinable ceramics, quartz crucibles, silicon wafers, equipment-parts cleaning and contract processing. Electronic-device and automotive-related offerings include magnetic fluids, thermoelectric cooling modules and power-semiconductor substrates, while the electronic-device range also lists chillers and thermistor components. Ferrotec Taiwan Co., Ltd. established a sales branch in Hsinchu to serve customers in Taiwan's high-technology fields and to provide more complete after-sales service. The company describes Taiwan as combining semiconductor and panel-technology companies with infrastructure that can support medium- and long-term development in high-technology fields.
Exhibits
Ferrotec supplies a wide range of quartz products for semiconductor, optical and other advanced industrial applications, including production intended to meet high-volume precision-quartz manufacturing requirements. Quartz fabrication can use Momentive grades 124 and 214 as standard materials, grades 224, 144 and 244 for low-alkali and low-aluminium requirements, and both transparent fused and opaque quartz materials. Ferrotec states that it mainly uses Momentive material and is one of the world's largest Momentive-certified manufacturers, while also sourcing materials from Saint Gobain, Heraeus and Tosoh. Quartz parts can be machined from existing customer drawings, and Ferrotec can also assist during the design stage to meet strict technical requirements for quartz products. Its quartz manufacturing system includes advanced machining, three-dimensional measuring equipment, process-wide quality control, ISO9002 certification, clean washing, cleanroom packaging, quartz-material assembly, welding and fine firing. For the transition from 8-inch to 12-inch silicon wafers, Ferrotec describes 12-inch cleanroom production facilities in its Hangzhou, Changzhou and Dongtai operations in China and at the Ferrotec Arion factory. The quartz-product list includes quartz windows, reaction tubes, heat-insulation blocks, outer tubes, cleaning tanks, insulation cylinders, quartz tanks, jet tubes, quartz covers, quartz rings, bell jars and quartz boats. Quartz products are shown for CVD equipment, where a heated substrate receives film-forming gas and a surface chemical reaction deposits a film. They are also shown for etching equipment used in semiconductor manufacturing to remove films formed during wafer pattern processing, with dry etching using plasma reactive species and wet etching using the corrosiveness of acids or alkalis. The thermoelectric-module portfolio includes micro, ultra-micro, gold-tin, single-stage, high-power, long-life, single-hole, multi-hole, flexible-substrate, multi-stage and epoxy-sealed cooling modules, together with customized cooling products. Related thermal products include the A030-12-DA-008 standard cooling module, TEC controllers, temperature demonstration equipment, thermal conductive silicone and water-cooling modules. Power-semiconductor substrate products include DCB substrates, AMB substrates, DAB (Direct Aluminum Bonded) substrates, DPC substrates and silicon-nitride substrates. The magnetic-fluid vacuum-product range includes solid-shaft, miniature-shaft, through-hole-shaft, flange, heavy-load and hollow-shaft sealed feedthroughs, as well as multi-axial, gas-purification, gas-circulation, high-vacuum, customized and robot sealed-feedthrough configurations. Precision-ceramic components include alumina, silicon nitride, silicon carbide, aluminium nitride and low-thermal-expansion materials, while machinable ceramics include machinable mica and machinable nitride products. Silicon-material parts include high-temperature annealing boats, high-temperature silicon rings, jet tubes, liners, boats, bases and silicon-material etching parts. The magnetic-fluid business lists audio applications, vibration-equipment applications, biomedical magnetic nanoparticles, Ferrobeads®, magnetic-domain observation applications, and education and art applications. Thermistor products include thermistor elements, thermistor assemblies and MNR varistors. The chiller range includes TEC-series air-cooled and water-cooled models, compression-series air-cooled and water-cooled models, a low-temperature compression chiller, thermal-shock equipment and a cascade-refrigeration chiller. Named chiller models include FCP30021A, FCP30025A, FCP60022A, FCP01232A, FCP30023W, FCP60024W, FCP60024L30W, FCP90026W, FCP01231W, FCCA0152204, FCCA0242202, FCCA0502206, FCCW0152203, FCCW0242201, FCCW0502205, FCCW0362303-20, FAM6031 and FCDA608031. Ferrotec's quartz crucibles are described as high-purity, heat-resistant parts used in single-crystal silicon pulling, with performance that significantly affects the crystallization rate of single-crystal silicon. The crucible business has developed four series, AQM-10, AQM-20, AQM-30 and AQM-40, for different crystal-growth processes and currently supports crucible sizes from 14 inches to 32 inches with technical capability for larger custom sizes. AQM-10 uses natural quartz with a transparent inner layer, AQM-20 adds high-purity natural sand, AQM-30 is a synthetic quartz crucible for higher-grade crystal pulling, and AQM-40 has a crystallized inner surface for repeated charging and long-duration use. Ferrotec also states that it developed a fully automated production line over three years for downstream crucible processing to maintain stable quartz-crucible quality. For silicon wafers, Ferrotec provides an integrated production sequence from single-crystal pulling for semiconductor wafers of 12 inches and below through wafer processing. The silicon-wafer business has built a global supply system centered on volume production for bipolar integrated circuits, discrete semiconductors and MEMS. Its silicon-wafer product line includes Single Crystal Ingot, Polished Wafer, Annealed Wafer and Epitaxial Wafer.
Capabilities and products
- precision quartz products for semiconductors
- high-volume precision quartz manufacturing
- quartz machining from drawings and design support
- quartz windows/reaction tubes/heat-insulation blocks
- magnetic-fluid vacuum sealed feedthroughs
- precision ceramic components
- CVD-SiC products
- machinable ceramic products
- silicon-material parts
- equipment-parts cleaning
- contract processing
- thermoelectric cooling modules (TEC/Peltier)
- DCB/AMB/DAB/DPC power-semiconductor substrates
- TEC-series chillers
- compression-series chillers
- 14–32-inch quartz crucibles with larger custom sizes
- integrated production of silicon wafers up to 12 inches
- polished/annealed/epitaxial silicon wafers
- thermistor elements and assemblies