At a glance
| Booth | M0948 |
| Country | CH |
| Product categories | Deep RIE etching; Dry Etching · Equipment, Nanotechnology Tools · Thin Film · Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD · Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment |
| Website | www.evatecnet.com |
Company profile
Evatec is your partner delivering thin film production solutions for Advanced Packaging, Semiconductor, Optoelectronics and Photonics. We offer a range of batch, cluster and inline deposition systems according to customer throughput, process requirements and fab integration requirements. Evatec's innovative source designs combined with Advanced Control (APC) technologies set new standards in process control through "in situ" capability for control of film properties during the deposition cycle. Visit the Evatec booth this year to hear all the latest updates in thin film production solutions: With more process capability, more flexibility and more throughput the new generation of HEXAGON simply gives you MORE. Learn how the new HEXAGON is the perfect choice for fan-out wafer level packaging (FOWLP) and Wafer Level Chip Scale (WLCSP) applications See how Evatec thin film solutions on SiC and GaN are helping customers "power ahead" in Wide Bang Gap power applications Hear how ou r thin film solutions for precision optical layers are enabling manufacturing costs to be driven down for Augmented Reality, Edge Emitting Lasers (EELs) and MicroLED Learn how Evatec thin film production solutions for Through Glass Via (TGV) for Advanced IC substrate applications enable seed layer deposition with excellent adhesion at both wafer and panel level The Evatec team look forward to welcomg you to our booth.
Capabilities and products
- Advanced Control (APC) in situ film-property control
- HEXAGON thin-film production for FOWLP and WLCSP
- SiC and GaN thin film solutions for wide bandgap power applications
- TGV seed layer deposition for advanced IC substrates
- batch deposition systems
- cluster deposition systems
- inline deposition systems
- precision optical layer thin-film solutions for AR, EEL and MicroLED
- thin film production solutions for advanced packaging and semiconductor applications