At a glance
| Booth | T9226 |
| Website | dms21.co.kr/en/index.asp |
Company profile
DMS Co., Ltd. manufactures core process equipment for LCD, OLED, and OLEDoS, placing display-related process equipment at the center of the manufacturing scope stated by the company. The company also manufactures wet equipment for glass-substrate processes, identifying wet processing on glass substrates as a separate equipment area within its stated manufacturing capabilities. DMS Co., Ltd. lists TGV (Through Glass Via) among its technology and equipment areas, alongside the LCD, OLED, OLEDoS, and glass-substrate wet-process work described in its product information. Its product presentation is organized around OLED/LCD and OLEDoS process equipment, with the company emphasizing in-house design and manufacturing capability for the key process tools in those display-fabrication environments.
Exhibits
For FPD fabrication, DMS Co., Ltd. states that it has full in-house capability to design and manufacture all four key process-tool categories identified in its lineup: Cleaning, Developing, Etching, and Stripping. Cleaning is one of the four FPD process-tool categories that DMS Co., Ltd. designs and manufactures in-house, making cleaning equipment part of the company's complete four-tool FPD fabrication set. Developing is also included in the four key FPD process tools produced with full in-house design and manufacturing capability, alongside Cleaning, Etching, and Stripping. Etching is listed as another key FPD fabrication tool within the same in-house design-and-manufacture scope, so the company does not limit its FPD equipment capability to cleaning or developing alone. Stripping completes the four named FPD process-tool categories, giving DMS Co., Ltd. an explicitly stated in-house set of Cleaning, Developing, Etching, and Stripping equipment for FPD fabrication. For OLEDoS fabrication, DMS Co., Ltd. separately states that it has full in-house capability to design and manufacture the key wet-process tools Pre-Clean, Post Dry-Etch Clean, Strip, and Post-Dicing Clean. Pre-Clean is the first named OLEDoS wet-process tool in the lineup and is included within the company's own design and manufacturing capability for OLEDoS fabrication equipment. Post Dry-Etch Clean is another explicitly listed OLEDoS wet-process tool, placing cleaning after dry etching within the group of tools DMS Co., Ltd. says it can design and manufacture in-house. Strip is included as a separate OLEDoS wet-process tool within the same in-house equipment capability, distinct from the Post Dry-Etch Clean and Post-Dicing Clean steps listed beside it. Post-Dicing Clean completes the four named OLEDoS wet-process tools, extending the stated in-house wet-equipment capability to a cleaning step after dicing in the OLEDoS fabrication flow. Taken together, the displayed product scope separates a four-tool FPD set of Cleaning, Developing, Etching, and Stripping from a four-tool OLEDoS wet-process set of Pre-Clean, Post Dry-Etch Clean, Strip, and Post-Dicing Clean, while also listing wet equipment for glass-substrate processes and TGV (Through Glass Via).
Capabilities and products
- FPD cleaning equipment
- FPD developing equipment
- FPD etching equipment
- FPD stripping equipment
- OLEDoS pre-clean equipment
- OLEDoS post-dry-etch cleaning equipment
- OLEDoS strip equipment
- OLEDoS post-dicing cleaning equipment
- wet-process equipment for glass substrates
- TGV (Through Glass Via) process equipment