At a glance
| Booth | S8152 |
| Country | TW |
| Website | www.tparus.com |
Company profile
T-PARUS TECHNOLOGY CO., LTD. was founded in 2013 in Taichung by partners with many years of semiconductor-industry experience, including experience related to agency business and technology introduction. Its Taichung location lies between Taiwan's northern and southern semiconductor technology parks, which the company identifies as a geographic and development advantage. The company's core direction is development, creation, integration, and value enhancement, with resources, equipment, and solutions designed for semiconductor technology environments and with an emphasis on better solutions and optimized system integration. Its mission is to develop semiconductor-related better solutions and cross-field system integration that help customers improve production efficiency and develop advanced processes. T-PARUS TECHNOLOGY CO., LTD. builds its ICRT business philosophy around Integrity, Courage, Reward, and Teamwork. Its stated advantages include professionalism, customized service, technical advantages, value creation, and growing together with customers. After years of accumulated experience and improvement, the company integrated multiple system solutions, including power-stabilization systems, semiconductor CIP packaged solutions, and green-energy and ESG-related products and service solutions. Its solution structure covers green-energy solutions, smart-robot solutions, semiconductor solutions, power-stabilization and energy-saving systems, vacuum-application systems, detection systems, and filtration-related products. The semiconductor business model includes representing or integrating manufactured products and combining detection and measurement with CIP products to form single or integrated responses to process problems. The smart-robot business addresses wafer and panel handling with monitoring, detection, anti-slip measures, wireless vibration sensing, abnormal-feature analysis, and FDC-linked real-time detection. The green-energy business addresses voltage sags with voltage-dip protection and signal systems and also includes compact UPS systems designed in Taiwan for solar-panel, hydroelectric, or battery input configurations. In 2023, the company established the Changzhi Technology brand and relocated to the Shuinan Economic and Trade Park in Taichung with the objective of developing localized and customized local-brand products. Through partners in different countries, T-PARUS TECHNOLOGY CO., LTD. has successfully exported to Korea and to a major semiconductor country, and its 2025 plan calls for developing the Southeast Asian market and increasing local advantages.
Exhibits
T-PARUS TECHNOLOGY CO., LTD. provides voltage-sag protection for semiconductor facilities because voltage sags can occur tens of times, and in some cases more than 100 times, as often as power outages over a ten-year period. Although a voltage sag may last only tens of milliseconds to several seconds, it can trip exposure equipment, etching equipment, vacuum systems, and other critical process equipment, leading to product scrap, equipment restart, and production loss lasting several hours or more. The company links these risks to continued worldwide attention to the SEMI F47 standard among wafer fabs. The voltage-sag protection equipment is the only equipment to have passed SEMI F47 verification and has more than 1,000 systems installed to date in the semiconductor industry. The voltage-sag protector provides a 0.5ms intervention time and guarantees 3~5 seconds of continuous power supply. The broader green-energy solution combines voltage-dip protection and signal systems with compact UPS systems designed in Taiwan, and those UPS systems can use inputs such as solar panels, hydroelectric power, or batteries for energy-saving, flexible custom, and special-environment applications. The green-energy offering also includes the Japanese patented MS-RDK energy-saving material for air-conditioning systems. In an air-conditioning test at a Cathay medical-system postpartum-care center, daily accumulated electricity consumption decreased from 27.18kWh before MS-RDK installation to 22.26kWh after installation, a reduction of 4.92kWh or 18.1％. For semiconductor process integration, T-PARUS TECHNOLOGY CO., LTD. addresses CIP, particle contamination, chemical contamination, ESD, vibration, temperature, sensor detection, and chamber-related needs. Its chemical-pipeline monitoring and protection combination includes Dual seal center ring, patented Super clamp, leak-detection acid-and-alkali tape, O2, N2, Particle, ESD, and TVOC detection instruments, and a locally produced chemical filter. Pipeline-leak solutions can use chemical leak detectors or leak-detection tape for detection and Dual Seal Center Rings, XHOT, and chemical filters for adsorption or elimination approaches. For wafer and panel handling, the Smart Fork solution combines wireless vibration sensing, abnormal-feature analysis, anti-slip polymer pads, and a patented smart vibration-monitoring sensor with FDC-linked alarm functions. Smart Fork can identify aging-part abnormalities and handling abnormalities in real time, collect early features, and use AI monitoring to stop abnormal losses from expanding during wafer transport. The system collects data and performs real-time calculation and analysis through an MCU, can convert vibration values into graphical displays on the main control panel, and can support earlier maintenance planning for robot abnormalities. Its AI monitoring can also intervene in a PLC when mass-production abnormalities occur, while the stated safety and sustainability functions include collision avoidance, reduced energy consumption, and protection of wafer output. The Smart Fork project has been applied in semiconductor and panel fields and sends data to factory control rooms in connection with Industry 4.0; a panel manufacturer referred to as Company I completed plant-wide deployment across its sites in 2021. The HEPC Series high-voltage electrostatic particle-collection system uses quick-release collection modules for easier maintenance and washable collection plates that avoid ordinary disposable filter consumables. HEPC supports AC 100~240V, 50/60Hz, and one controller can support up to 4 collection modules. Its controller is designed for EMI / EMS resistance, and when abnormal high-voltage operation occurs through contact with a conductor or a person, the system issues an Alarm and interrupts power only to the affected module while the other PM modules continue operating. HEPC also uses low-noise fans and external protective mesh around the high-voltage modules for operating noise and personnel-safety control. The vacuum-application range includes BronkHorst® mass-flow meters and mass-flow controllers for gas, liquid, or gas-liquid applications across energy, life science, electronic equipment, and food-and-beverage fields, including general-purpose, industrial, high-purity, and micro-liquid-system environments. Dual Sealed Teflon Centering is a patented double-protection connection design for corrosive and high-temperature piping, using Teflon to tighten pipe connections and reduce leak and contamination risks associated with seal aging and pump vibration. X-Hot Super Suction Hot N2 System is an improved high-speed nitrogen heater above 150 degrees that is intended to improve vacuum-pump exhaust performance, reduce process-waste powder accumulation in piping, reduce cleaning frequency and cost, and increase equipment up-time. Bronkhorst gas-flow measurement and control covers flows from 0,014 mln/min to 11.000 m3n/h for laboratory, machinery, industrial, and hazardous locations. For liquid flow, the ranges include thermal mass-flow instruments at 5 mg/h - 1 kg/h, Coriolis mass-flow meters at 50 mg/h - 600 kg/h, ultrasonic volumetric-flow instruments at 2 ml/min - 1500 ml/min, and vortex or electromagnetic instruments up to 250 l/min. The AQST gas-concentration monitoring system provides real-time monitoring and upload of gas concentration, LED real-time display, Data to FDC, and self-heating at 60 °C / 180 °C.
Capabilities and products
- 0.5ms semiconductor voltage-sag protection
- compact UPS systems for solar, hydroelectric, or battery inputs
- air-conditioning energy-saving material supply (MS-RDK)
- wireless vibration monitoring for wafer and panel handling
- FDC-linked real-time abnormality detection for robot arms
- chemical pipeline leak detection
- supply of double-protection connectors for corrosive and high-temperature piping
- X-Hot high-speed hot N2 system supply
- HEPC high-voltage electrostatic particle collection system supply
- gas flow measurement and control instrument supply (BronkHorst®)
- liquid flow measurement and control instrument supply (BronkHorst®)
- O2/N2/Particle/ESD/TVOC detection integration
- chemical-filter integration for semiconductor processes
- AQST gas concentration monitoring system supply