At a glance
| Booth | S8345 |
| Country | TW |
| Website | www.pyc.com.tw |
Company profile
Spec / Content Tool Name ASTRON (Single Wafer Cleaner) Model SWC3008 SWC3012 SWC3016 No. of Chamber 8 12 16 Max. Throughput (wf/hr) 480 User Spec. User Spec. Dimension (mm) Width 2,230 2,300 2,300 Length 2,165 2,760 2,760 Height 3,150 2,450 3,150 Usage Cleaning & Etching Wafer Size 300mm (200mm Option) No. of Loadport 3 or 4 FA OHT, AGV Chemical Acid, Alkali, IPA, Hot DIW, DIW Robots 2 for EFEM & Main (MTR) Chemical Injection Front & Backside together Dry IPA liquid + N2 Options Megasonic, Nanospray Uniformity 5%
Capabilities and products
- 300mm wafer cleaning with 200mm option
- 480 wafers per hour single-wafer-cleaner throughput
- ASTRON SWC3008/SWC3012/SWC3016 single wafer cleaner
- frontside and backside chemical injection
- megasonic and nanospray single-wafer-cleaner options
- single-wafer cleaning and etching