At a glance
| Booth | Q6158 |
| Country | CA |
| Website | www.icspicorp.com |
Company profile
Founded in 2007, our mission at icspi is to expand access to nanoscale measurement tools. We make desktop atomic force microscopes (AFMs) with unmatched time-to-results, ease of use and hassle-free operation. Our systems enable scientists and engineers to shorten development cycles and make discoveries faster. icspi is headquartered in Kitchener-Waterloo, Canada, and all of our instruments are designed, assembled and shipped from our headquarters. Traditional AFM instruments, while powerful for nanoscale surface imaging, are complex and time-consuming because they are based on technology developed in the 1980s. At icspi, we have dramatically simplified and sped up operation of AFM using integrated sensor technology, which was developed over the course of ten years at the University of Waterloo. Our first product, the nGauge, is a desktop AFM. The Redux AFM collects high-resolution 3D topography data in minutes: quantitative 3D data with sub-nanometer precision, built-in scanners and sensors with motorized X, Y and Z stages, measuring topography, roughness, thickness and particle size. Atomic force microscopy is the gold standard for Z-axis measurement, but it is too slow for high-volume manufacturing; icspi's AFM array technology enables extreme throughput and unprecedented wafer coverage with AFM. The AFM array technology uses miniaturized 1 mm2 AFM scan heads in parallel, each scan head an entire MEMS-based AFM, with 3-axis control for fine positioning and scanning and on-chip sensing that eliminates laser alignment. It enables chipmakers to achieve faster time-to-yield and faster time-to-market, one-shot full wafer AFM metrology, and die-to-die hotspot comparison.
Exhibits
Desktop atomic force microscopes (AFMs) include the nGauge and Redux AFM; Redux acquires high-resolution 3D topography data and measures topography, roughness, thickness and particle size. AFM array technology uses parallel miniature MEMS-based AFM scan heads for high-throughput full-wafer metrology and die-to-die hotspot comparison.
Capabilities and products
- desktop atomic force microscope manufacturing
- nGauge desktop AFM
- Redux AFM sub-nanometer 3D topography measurement
- measurement of topography roughness thickness and particle size
- AFM array technology for extreme throughput
- 1 mm2 MEMS-based miniaturized AFM scan head
- on-chip sensing that eliminates laser alignment
- one-shot full wafer AFM metrology
- integrated sensor technology