At a glance
| Booth | M0558 |
| Country | TW |
| Website | www.parker.com |
Company profile
Parker Hannifin Corporation was founded in 1917 and supplies motion and control technologies and precision-engineered systems for mobile, industrial and aerospace markets. Its global organization spans 50 countries, 142 divisions and 323 manufacturing plants, with 13,000 distribution and MRO outlets serving 1,100 markets. Parker reports 875,000 products sold and 465,000 customers across seven product groups: Aerospace, Automation, Filtration, Fluid Connectors, Hydraulics, Instrumentation and Engineered Materials. The company's engineering model combines a broad set of core technologies with customer partnerships intended to improve productivity and profitability through motion and control products and systems. Parker Hannifin Taiwan Co. Ltd. was established in 1992 and states that it has provided more than 20 years of service in Taiwan. The Taiwan organization positions its role around designing and delivering motion and control products and systems for different market applications.
Exhibits
For semiconductor process control, Parker Hannifin Taiwan Co. Ltd. supplies instrumentation and high-purity regulators, diaphragm and bellows valves, ultra-high-purity valves, face seals, welded assemblies and high-purity fitting systems. The broader semiconductor-related range includes PFA/PTFE tubing, valves and fittings, ultra-high-purity O-rings and seals, pneumatic vacuum products, pneumatic proportional regulators, air-gas filters, liquid cartridges, membrane filter cartridges and particle counters. Its semiconductor highlights group UHP regulators, UHP diaphragm and check valves, PFA and PTFE regulators, valves and fittings, and temperature-control systems under instrumentation process solutions. Fluid-connector offerings include Parflex PTFE and PAGE fluoropolymer hose lines, specialty-gas metal hose, NSS Quick Coupling and 801 Push Lok rubber hose. The eco-designed CleanFit push-to-connect fitting is intended for high-tech equipment, with compatibility for most gases and requirements involving cleanliness, reliability and safety. The I-Force 410 ironless linear motor provides peak thrust up to 3928N in a 50.8mm width, with rapid acceleration and an I-shaped coil designed for performance and heat dissipation. The mSR 80 miniature square-rail linear stage integrates a linear motor, high-resolution feedback and precision square guides in an 80 mm wide and 25 mm high platform for space-limited applications. Parker Prädifa FKM O-rings are listed for semiconductor applications requiring very low gas permeability, mechanical strength and extrusion resistance, while Fluoroflow® pleated filter cartridges are designed for filtration of industrial chemicals used in corrosive wet etching and cleaning. Parker's semiconductor fluid-control applications cover VMBs and CMBs for stable distribution of specialty gases to production equipment, and gas cabinets for storing gas cylinders and delivering hazardous gases to process equipment. For specialty chemicals, CCSS and SDS systems are described as devices that safely and stably supply specialty chemicals or slurries to semiconductor production equipment, while BSGS supports distribution from bulk gas supply systems such as large cylinders, Y-type cylinders or receiver trailers. Parker Veriflo UHP regulators and valves are manufactured and packaged in Class 100 cleanrooms and assembly rooms and use materials including Vericlean and Hastelloy C-22® for compatibility with high-flow corrosive gases. Named regulator products include the SQ 140 for point-of-use applications, FR1400 for high pressure and flow, QR 4000 for improved leak protection and 959 with a tied diaphragm for added safety. The UHP diaphragm-valve portfolio covers maximum flow rates up to 1.30 Cv (18R) and operating pressures from 300 Psig to 3,500 Psig, using threadless and springless process-fluid-contact designs to minimize particle generation and contamination. Models listed for valve functions include the 930 diaphragm valve for leak integrity and corrosion resistance, the 945 diaphragm valve with springless and threadless design, 17R and 18R valves for high flow and high pressure, and the F9 check valve with a patented spring design for noise-free operation. UHP PFA and PTFE regulators, valves and fittings are positioned for ultra-high-purity and corrosive-chemical handling systems, including fab-equipment connections, with high-purity PFA or PTFE intended to reduce surface particles and total organic carbon. Examples include the PR-1 PTFE regulator with a tongue-and-groove seal, PFA Parflare fittings for reducing fluid particles and contamination, the MV-13 PFA needle valve rated fully functional to 100psi, and CASY custom assemblies. For semiconductor chillers and precise temperature control, Parker lists the APK Superheat Controller, IB-K integrated interface board, SER bipolar electronic expansion valve, SDR bypass discharge valve and MTW electronic 3-way control valve. The SER valve combines solenoid tight seating with corrosion-resistant materials, the SDR can interface with direct digital control or building-management systems, and the MTW is designed to simplify piping material cost, installation time and piping complexity. Parker positions its semiconductor process-control products around reliable performance, efficiency and digital transformation for semiconductor applications. The Fluoroflow® pleated filter cartridge is also described as a cost-effective filter that provides good flow rate and service life for the targeted chemical-filtration applications. The IB-K integrated interface board is described with fast response and reliability and can control conditions including voltage, current and valve speed through one integrated board.
Capabilities and products
- Clean-gas push-in fittings
- Ironless linear motors
- Miniature linear motor stages
- FKM O-rings for semiconductor applications
- Pleated filter cartridges for corrosive wet-etching and cleaning chemicals
- Ultra-high-purity regulators
- Ultra-high-purity diaphragm valves
- Ultra-high-purity check valves
- PFA/PTFE regulators
- PFA/PTFE valves
- PFA/PTFE fittings
- Fluoropolymer hoses
- Metal hoses for specialty gases
- Quick couplings
- Rubber hoses
- Bellows valves
- Ultra-high-purity fittings
- Face seals and welded assemblies
- Cylinder connections
- Membrane filter cartridges
- PFA/PTFE tubing
- Ultra-high-purity seals
- Pneumatic proportional regulators
- Air and gas filters
- Liquid filter cartridges
- Particle counters
- Pneumatic vacuum products
- Superheat controllers for semiconductor chillers
- Electronic expansion valves
- Bypass discharge valves
- Electronic three-way control valves
- Custom assembly of PFA/PTFE fluid-control components